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Journal of the Electrochemical Society

Volumn 156, Issue 5, 2009, Pages

Yb2o3 thin films as a sensing membrane for pH-ISFET application

(3) Pan, Tung Ming a Cheng, Chih Hung a Lee, Cheng Da a

a CHANG GUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC SPECTROSCOPY; CRYSTAL ATOMIC STRUCTURE; SEMICONDUCTING SILICON COMPOUNDS; SILICA; SURFACE ROUGHNESS; YTTERBIUM;

ANNEALING CONDITIONS; ATOMIC FORCES; DRIFT RATES; HIGH SENSITIVITIES; HYSTERESIS VOLTAGES; MORPHOLOGICAL FEATURES; SENSING CHARACTERISTICS; SENSING MEMBRANES; SI (100) SUBSTRATES; SILICA LAYERS; X- RAY DIFFRACTIONS; X-RAY PHOTOELECTRON SPECTROSCOPIES;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 63649154096 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.3089365 Document Type: Article

Times cited : (34)

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