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Applied Physics A: Materials Science and Processing

Volumn 79, Issue 8, 2004, Pages 1887-1890

Sub-surface damage in indium phosphide caused by micromachining of grooves with femtosecond and nanosecond laser pulses

(4) Borowiec, A a Couillard, M a Botton, G A a Haugen, H K a

a MCMASTER UNIVERSITY (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISPERSIVE SPECTROSCOPY; ION BEAMS; IRRADIATION; LASER BEAM EFFECTS; LASER PULSES; MICROMACHINING; MORPHOLOGY; PLASTIC DEFORMATION; POLYCRYSTALLINE MATERIALS; SURFACE STRUCTURE; TRANSMISSION ELECTRON MICROSCOPY;

DIFFRACTION PATTERNS; FOCUSED ION BEAMS (FIB); GATAN IMAGING FILTERS (GIF); LASER INDUCED PERIODIC SURFACE STRUCTURES (LIPSS);

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 6344284309 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-004-2962-x Document Type: Article

Times cited : (40)

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