Microstructural characterization of solid-phase crystallized amorphous silicon films recrystallized using an excimer laser

Applied Physics Letters

Volumn 70, Issue 6, 1997, Pages 767-769

  Giust, G K ^a   Sigmon, T W ^a,b  

^a Arizona State University   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003694766     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118254     Document Type: Article

References (12)

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