Fabrication of arrays of carbon micro- and nanostructures via electrochemical etching

Micro and Nano Letters

Volumn 4, Issue 1, 2009, Pages 22-26

  Ssenyange, S ^b   Du, R ^a   McDermott, M T ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b FORMFACTOR INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODISATION; CARBON STRUCTURES; CARBON SUBSTRATES; FABRICATION PROCEDURES; FAILURE RATES; GRAPHITIC CARBONS; MICRO ELECTRODE ARRAYS; MICRO- AND NANOSTRUCTURES; MICRO-FABRICATION TECHNOLOGIES; PATTERN TRANSFERS; SUB MICRONS; THIN CARBON FILMS;

CARBON FILMS; ETCHING; GRAPHITE; SCANNING ELECTRON MICROSCOPY;

FABRICATION;

CARBON; ELECTROLYTE; GRAPHITE; NANOMATERIAL;

ANODIZATION; ARTICLE; CARBON ARRAY; DEVICE; ELECTROCHEMICAL ETCHING; ELECTROCHEMISTRY; FILM; MICROELECTRODE; NANOTECHNOLOGY; PHOTOLITHOGRAPHY; PHOTORESIST; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; TECHNIQUE;

EID: 63349094103     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl:20080047     Document Type: Article

References (35)

1. Lam, K.S., and Renil, M.: ' From combinatorial chemistry to chemical microarray ', Curr. Opin. Chem. Biol., 2002, 6, p. 353
2. Cote, G.L., Lec, R.M., and Pishko, M.V.: ' Emerging biomedical sensing technologies and their applications ', IEEE Sens. J., 2003, 3, p. 251 10.1109/JSEN.2003.814656 1530-437X
3. Stett, A., Egert, U., and Guenther, E.: et al. ' Biological application of microelectrode arrays in drug discovery and basic research ', Anal. Bioanal. Chem., 2003, 377, p. 486
4. Folch, A., and Toner, M.: ' Microengineering of cellular interactions ', Annu. Rev. Biomed. Eng., 2000, 2, p. 227
5. Voldman, J., Gray, M.L., Toner, M., and Schmidt, M.A.: ' A microfabrication-based dynamic array cytometer ', Anal. Chem., 2002, 74, p. 3984 0003-2700
6. Tao, S.L., and Desai, T.A.: ' Microfabricated drug delivery systems: from particles to pores ', Adv. Drug Deliv. Rev., 2003, 55, p. 315
7. Gray, D.S., Tan, J.L., Voldman, J., and Chen, C.S.: ' Dielectrophoretic registration of living cells to a microelectrode array ', Biosens. Bioelectron., 2004, 19, p. 771 10.1016/j.bios.2003.08.013 0956-5663
8. Fu, Y.Q., Kok, N., and Bryan, A.: ' Microfabrication of microlens array by focused ion beam technology ', Microelectron. Eng., 2000, 54, p. 211 10.1016/S0167-9317(00)00416-0 0167-9317
9. Jeong, K.H., Liu, G.L., Chronis, N., and Lee, L.P.: ' Tunable microdoublet lens array ', Opt. Express, 2004, 12, p. 2494 1094-4087
10. Bratten, C.D.T., Cobbold, P.H., and Cooper, J.M.: ' Micromachining sensors for electrochemical measurement in subnanoliter volumes ', Anal. Chem., 1997, 69, p. 253 0003-2700
11. Cai, X., Glidle, A., and Cooper, J.M.: ' Miniaturized electroanalytical sensor systems in micromachined structures ', Electroanalysis, 2000, 12, p. 631
12. Feeney, R., and Kounaves, S.P.: ' Microfabricated ultramicroelectrode arrays: developments, advances and applications in environmental analysis ', Electroanalysis, 2000, 12, p. 677
13. Suzuki, H.: ' Advances in the microfabrication of electrochemical sensors and systems ', Electroanalysis, 2000, 12, p. 703
14. Hanrahan, G., Patil, D.G., and Wang, J.: ' Electrochemical sensors for environmental monitoring: design, development and applications ', J. Environ. Monit., 2004, 6, p. 657
15. McCreery, R.L.: ' Advanced carbon electrode materials for molecular electrochemistry ', Chem. Rev., 2008, 108, p. 2646
16. Schueller, O.J.A., Brittain, S.T., and Whitesides, G.M.: ' Fabrication of GC microstructure by soft lithography ', Sens. Actuators A, 1999, 72, p. 125
17. Schueller, O.J.A., Brittain, S.T., and Whitesides, G.M.: ' Fabrication of GC microstructure by pyrolysis of microfabricated polymeric precusors ', Adv. Mater., 1997, 9, p. 477 0935-9648
18. Kuhnke, M., Lippert, T., Scherer, G.G., and Wokaun, A.: ' Microfabrication of flow field channels in glassy carbon by a combined laser and reactive ion etching process ', Surf. Coat. Technol., 2005, 200, p. 730 10.1016/j.surfcoat.2005.01.096
19. Kiema, G.K., Ssenyange, S., and McDermott, M.T.: ' Microfabrication of glassy carbon by electrochemical etching ', J. Electrochem. Soc., 2004, 151, p. C142 10.1149/1.1639165 0013-4651
20. Ssenyange, S., Taylor, J., Harrison, D.J., and McDermott, M.T.: ' A glassy carbon microchip for electrospray mass spectrometry ', Anal Chem., 2004, 76, p. 2393 0003-2700
21. Ranganathan, S., McCreery, R.L., Majji, S.M., and Madou, M.: ' Photoresist-derived carbon for MEMS and electrochemical systems ', J. Electrochem. Soc., 2000, 147, p. 277 0013-4651
22. Ranganathan, S., and McCreery, R.L.: ' Electroanalytical performance of carbon films with near-atomic flatness ', Anal. Chem., 2001, 73, p. 893 0003-2700
23. Lin, Z., Takahashi, Y., Kitagawa, Y., Umemura, T., Shiku, H., and Matsue, T.: ' An addressable microelectrode array for electrochemical detection ', Anal. Chem., 2008, 80, p. 6830 0003-2700
24. Beni, V., and Arrigan, D.W.M.: ' Microelectrode arrays and microfabricated devices in electrochemical stripping analysis ', Current Anal. Chem., 2008, 4, p. 229
25. Ordeig, O., del Campo, J., Munoz, F.X., Banks, C.E., and Compton, R.G.: ' Electroanalysis utilizing amperometric microdisk electrode arrays ', Electroanalysis, 2007, 19, p. 1973
26. Zoski, C.G.: ' Ultramicroelectrodes: design, fabrication, and characterization ', Electroanalysis, 2002, 14, p. 1041
27. Morita, K., and Shimizu, Y.: ' Microhole array for oxygen electrode ', Anal. Chem., 1989, 61, p. 159 0003-2700
28. Shimizu, Y., and Morita, K.: ' Microhole array electrode as a glucose sensor ', Anal. Chem., 1990, 62, p. 1498 0003-2700
29. Fletcher, S., and Horne, M.D.: ' RAM electrodes for electrochemical studies ', Electrochem. Commun., 1999, 1, p. 502 1388-2481
30. Sleszynski, N., Osteryoung, J., and Carter, M.: ' The analysis of very small voltammetric electrodes based on reticulated vitreous carbon ', Anal. Chem., 1984, 56, p. 130 0003-2700
31. Niwa, O., and Tabel, H.: ' Voltam. meas. rev and quasi-rev redox species using carbon film based interdig array microelec. ', Anal. Chem., 1994, 66, p. 285 0003-2700
32. Sreenivas, G., Ang, S.S., Fritsch, I., Brown, W.D., Gerhardt, G.A., and Woodward, D.J.: ' Fabrication and charaterization of sputtered-carbon microelectrode arrays ', Anal. Chem., 1996, 68, p. 1858 0003-2700
33. Okuno, J., Maehashi, K., Kerman, K., Takamura, Y., Matsumoto, K., and Tamiya, E.: ' Label-free immunosensor for prostate-specific antigen based on single-walled carbon nanotube array-modified microelectrodes ', Biosens. Bioelectron., 2007, 22, p. 2377 10.1016/j.bios.2006.09.038 0956-5663
34. Tu, Y., Lin, Y.H., and Ren, Z.F.: ' Nanoelectrode arrays based on low site density aligned carbon nanotubes ', Nano Lett., 2003, 3, p. 107 1530-6984
35. Streeter, I., Fietkau, N., Del Campo, J., Mas, R., Munoz, F.X., and Compton, R.G.: ' Voltammetry at regular microband electrode arrays: theory and experiment ', J. Phys. Chem. C, 2007, 111, p. 12058 10.1021/jp073224d