Fabrication and characterization of sputtered-carbon microelectrode arrays

Analytical Chemistry

Volumn 68, Issue 11, 1996, Pages 1858-1864

  Sreenivas, G ^a   Ang, Simon S ^a   Fritsch, Ingrid ^b   Brown, William D ^a   Gerhardt, Greg A ^c   Woodward, Donald J ^d  

^a 3202 Bell Engineering Center   (United States)

^b UNIVERSITY OF ARKANSAS   (United States)

^c UNIVERSITY OF COLORADO   (United States)

^d WAKE FOREST SCHOOL OF MEDICINE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; CROSSTALK; CYCLIC VOLTAMMETRY; DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC IMPEDANCE; ELECTROCHEMISTRY; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; THIN FILM DEVICES;

SPUTTER DEPOSITED THIN FILM CARBON MICROELECTRODE ARRAY;

MICROELECTRODES;

EID: 0030165549     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac9508816     Document Type: Article

References (40)

1. Adams, R. N. Anal. Chem. 1976, 48, 1126A-1138A
2. Kissinger, P. T. Anal Chem. 1977, 49, 447A-456A.
3. Ponchon, J. L.; Cespulgio, R.; Gonon, F.; Jouvet, M.; Pujol, J. F. Anal. Chem. 1979, 51, 1483-1486.
4. Ewing, A. G., Wightman, R. M.; Dayton, M. A. Brain Res. 1982, 249, 361-370.
5. Schenk, J O.; Miller, E.; Rice, M. E.; Adams, R. N. Brain Res. 1983, 277, 1-8.
6. Horiuchi, T.; Niwa, O.; Morita, M., Tabei, H. Anal. Chem 1992, 64, 3206-3208.
7. Niwa, O.; Tabei, H. Anal. Chem. 1994, 66, 285-289.
8. McCreery, R. L. Electroanal Chem. 1991, 17, 221-370.
9. Wightman, R. M.; May, J. L.; Michael, A. C. Anal. Chem. 1988, 60, 769A-779A
10. Spekhorst, H.; Sippensgroenewegen, A.; David, K. J.; Van Rijn, M. C.; Broekhuijsen, P. IEEE Trans. Biomed. Eng. 1988, 35, 402-406.
11. Wang, J.; Freiha, B. A. J. Chromatogr. 1984, 298, 79-87.
12. Weisshaar, D. E.; Tallman, D. E. Anal. Chem. 1983, 55, 1146-1151
13. Poon, M.; McCreery, R. L. Anal Chem. 1986, 58, 2745-2750.
14. Sleszynski, N.; Osteryoung, J.; Carter, M. Anal. Chem. 1984, 56, 130-135
15. Rajo, A.; Rosenstratten, A.; Anjo, D. Anal. Chem 1986, 58, 2988-2991.
16. Starr, A.; Wise, K. D.; Csongradi, J. IEEE Trans. Biomed. Eng. 1973, 20, 291-293.
17. Kittlesen, G. P.; White, H. S.; Wrighton, M. S. J. Am. Chem. Soc 1985, 107, 7373-7380.
18. Reller, H.; Kirowa-Wisner, E.; Gileadi, E. J. Electroanal. Chem. 1984, 161, 247-268.
19. Cassidy, J.; Ghoroghchain, J.; Sarfarazi, F.; Smith, J. J.; Pons, S. Electrochim. Acta 1986, 31 (6), 629-636.
20. Bard, A. J.; Crayston, J. A.; Kittlesen, G. P.; Shea, T. V.; Wrighton, M. S. Anal Chem. 1986, 58, 2321-2331.
21. Matsue, T.; Aoki, A.; Ando, E.; Uchida, I. Anal Chem. 1990, 62, 407-409.
22. Aoki, K.; Morita, M.; Niwa, O.; Tabei, H. J. Electroanal. Chem 1989, 267, 291-297.
23. Sanderson, D. G.; Anderson, L. B. Anal. Chem. 1985, 57, 2388-2393.
24. van Home, C. G.; Bernent, S.; Hoffer, B. J.; Gerhardt, G. A. Neurosci. Lett. 1990, 120, 249-252.
25. In this article, the array of electrodes is sometimes referred to as the microprobe, and each electrode in the array is referred to as a site.
26. Finne, R. M ; Klein, D. L J. Electrochem. Soc. 1967, 114 (9), 965-970.
27. Reisman, A.; Berkenblit, M.; Chan. S. A.; Kaufman, F. B.; Green, D. C J. Electrochem. Soc. 1979, 126 (8), 1406-1415.
28. Clark, S. T.; Paul, D. W.; Sundgren, H.; Lundstrom, I. Microchem. J. 1992, 46, 225-233.
29. Prohaska, O J., Olcaytug, F.; Pfunder, P.; Dragaun, H. IEEE Trans. Biomed. Eng 1986, 33 (2), 223-229.
30. Bernent S. L.; Wise, K. D.; Anderson, D. J., Najsfi, K.; Drake, D. L. IEEE Trans. Biomed. Eng. 1986, 33, 230-241.
31. Najafi, K., Wise, K. D. J. Solid-State Circuits 1986, 21 (6), 1035-1044.
32. Anderson, D. J ; Najafi, K.; Tanghe, S. J.; Evans, D. A.; Levy, K. L.; Hetke, J. F.; Xue, X.; Zappia, J. J.; Wise, K. D. IEEE Trans Biomed. Eng 1989, 36 (7), 693-703.
33. Najafi, K.; Ji, J.; Wise, K. D. IEEE Trans Biomed. Eng. 1990, 37 (1), 1-11.
34. Pochay, P.; Wise, K. D.; Allard, L. F.; Rutledge. IEEE Trans. Biomed. Eng 1979, 26 (4), 199-206.
35. Wightman, R. M. Anal. Chem. 1981, 53 (9), 1125A-1134A.
36. Bard, A. J.; Faulkner, L. R. Electrochemical Methods: Fundamentals and Applications, John Wiley & Sons, Inc.: New York, 1980.
37. Licht, S.; Cammarata, V.; Wrighton, M. S. Science 1989, 243, 1176-1178.
38. Gerhardt, G. A.; Oke, A. F.; Moghaddam, B.; Adams, R. N Brain Res. 1984, 290, 390-395.
39. Nagy, G.; Gerhardt, G. A.; Oke, A. F.; Rice, M. E., Adams, R. N. J. Electroanal. Chem. 1985, 188, 85-94.
40. Detection limit is calculated at a S/N ratio of 3 from the software: IVEC Manual; Rocky Mountain Center for Sensor Technology, Denver, CO. 1993.