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Volumn , Issue , 2008, Pages 399-404

Low temperature copper-copper thermocompression bonding

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRONICS PACKAGING; SHEAR STRENGTH;

EID: 63049131679     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EPTC.2008.4763467     Document Type: Conference Paper
Times cited : (21)

References (17)
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  • 5
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    • The Effect of Forming Gas Anneal on the Oxygen Content in Bonded Copper Layer
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    • (2005) Journal of Electronic Materials , vol.34 , pp. 1598
    • Tan, C.S.1    Chen, K.N.2    Fan, A.3    Reif, R.4
  • 8
    • 0035304419 scopus 로고    scopus 로고
    • Microstructure Examination of Copper Wafer Bonding
    • K. N. Chen, A. Fan, and R. Reif, "Microstructure Examination of Copper Wafer Bonding," Journal of Electronic Materials, vol. 30, p. 331, 2001.
    • (2001) Journal of Electronic Materials , vol.30 , pp. 331
    • Chen, K.N.1    Fan, A.2    Reif, R.3
  • 9
    • 0037103962 scopus 로고    scopus 로고
    • Interfacial Morphologies and Possible Mechanisms of Copper Wafer Bonding
    • K. N. Chen, A. Fan, and R. Reif, "Interfacial Morphologies and Possible Mechanisms of Copper Wafer Bonding," Journal of Materials Science, vol. 37, p. 3441, 2002.
    • (2002) Journal of Materials Science , vol.37 , pp. 3441
    • Chen, K.N.1    Fan, A.2    Reif, R.3
  • 10
    • 33644913103 scopus 로고    scopus 로고
    • Temperature and Pressure Dependence on Thermocompression Gold Stud Bonding
    • X.F. Ang, G.G. Zhang, J. Wei, Z. Chen, and C.C. Wong, "Temperature and Pressure Dependence on Thermocompression Gold Stud Bonding," Thin Solid Films, vol. 504, pp. 379-383, 2006.
    • (2006) Thin Solid Films , vol.504 , pp. 379-383
    • Ang, X.F.1    Zhang, G.G.2    Wei, J.3    Chen, Z.4    Wong, C.C.5
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    • 8th ed. American Welding Society
    • A. L. Phillips, Cold Welding, 8th ed. vol. 2: American Welding Society, 1991.
    • (1991) Cold Welding , vol.2
    • Phillips, A.L.1
  • 15
    • 0036722434 scopus 로고    scopus 로고
    • Optical Characterizatin of thin thermal oxide films on copper by ellipsometry
    • H. Derin and K. Kantarli, "Optical Characterizatin of thin thermal oxide films on copper by ellipsometry," App. Phys. A, vol. 75, p. 391, 2002.
    • (2002) App. Phys. A , vol.75 , pp. 391
    • Derin, H.1    Kantarli, K.2
  • 16
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    • Optical Properties of Copper Oxide Films
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    • Wieder, H.1    Czanderna, A.W.2
  • 17
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    • Effect of Working Temperature on Young's Modulus of Electrolytic Copper
    • T. H. Youssef and R. A. Essawi, "Effect of Working Temperature on Young's Modulus of Electrolytic Copper," Czechoslovak Journal of Physics, vol. 29, p. 1266, 1979.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.