3DAP analysis of (Ga,Mn)As diluted magnetic semiconductor thin film

Ultramicroscopy

Volumn 109, Issue 5, 2009, Pages 644-648

  Kodzuka, M ^a   Ohkubo, T ^b,c   Hono, K ^a,b,c   Matsukura, F ^d   Ohno, H ^d  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^d TOHOKU UNIVERSITY   (Japan)

Author keywords

(Ga,Mn)As; Atom probe; Diluted magnetic semiconductor; DMS; FIB; SEM; Specimen preparation

Indexed keywords

(GA,MN)AS; ATOM PROBE; DILUTED MAGNETIC SEMICONDUCTOR; DMS; FIB; SEM;

ATOMS; DIAMONDS; DISSOLUTION; ELECTRIC CONDUCTIVITY; FILM PREPARATION; FOCUSED ION BEAMS; MAGNETIC SEMICONDUCTORS; MANGANESE; MANGANESE COMPOUNDS; PROBES; SIPHONS; SPECIMEN PREPARATION; THREE DIMENSIONAL;

GALLIUM ALLOYS;

ARSENIC; FERROMAGNETIC MATERIAL; GALLIUM; MANGANESE;

ARTICLE; ELECTRON MICROSCOPY; FILM; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; THREE DIMENSIONAL ATOM PROBE;

EID: 62549136941     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2008.11.011     Document Type: Article

References (24)

1. Gault B., Vurpillot F., Vella A., Gilbert M., Menand A., Blavette D., and Deconihout B. Rev. Sci. Instrum. 77 (2006) 043705
2. Gault B., Vurpillot F., Bostel A., Menand A., and Deconihout B. Appl. Phys. Lett. 86 (2005) 094101
3. Cerezo A., Smith G.D.W., and Clifton P.H. Appl. Phys. Lett. 88 (2006) 154103
4. Kelly T.F., Larson D.J., Thompson K., Alvis R.L., Bunton J.H., Olson J.D., and Gorman B.P. Annu. Rev. Mater. Res. 37 (2007) 681
5. Gorman B., Diercks D., Kaufman M., Ulfig R., Lawrence D., Thompson K., and Larson D. Microsc. Microanal. 12 Suppl. 02 (2006) 1720
6. Bunton J.H., Olson J.D., Lenz D.R., and Kelly T.F. Microsc. Microanal. 13 (2007) 418
7. Larson D.J., Foord D.T., Petford-Long A.K., Anthony T.C., Rozdilsky I.M., Cerezo A., and Smith G.D.W. Ultramicroscopy 75 (1998) 147
8. Larson D.J., Foord D.T., Petford-Long A.K., Cerezo A., and Smith G.D.W. Nanotechnology 10 (1999) 45
9. Larson D.J., Foord D.T., Petford-Long A.K., Liew H., Blamire M.G., Cerezo A., and Smith G.D.W. Ultramicroscopy 79 (1999) 287
10. Thompson G.B., Miller M.K., and Fraser H.L. Ultramicroscopy 100 (2004) 25
11. Larson D.J., Wissman B.D., Martens R.L., Viellieux R.J., Kelly T.F., Gribb T.T., Erskine H.F., and Tabat N. Microsc. Microanal. 7 (2001) 24
12. T. F. Kelly, R. L. Martens, S. L. Goodman, Method of sampling specimens for microanalysis. US Patent No. 6,576,900, 2003.
13. Thompson G.B., Miller M.K., Banerjee R., and Fraser H.L. J. Mater. Res. 56 11 (2004) 314
14. Thompson K., Lawrence D., Larson D.J., Olson J.D., Kelly T.F., and Gorman B. Ultramicroscopy 107 (2007) 131
15. Ohno H. J. Magn. Magn. Mater. 200 (1999) 110
16. Dietl T., Ohno H., Matsukura F., Cibert J., and Ferrand D. Science 287 (2000) 1019
17. Jungwirth T., Wang K.Y., Masek J., Edmonds K.W., König J., Sinova J., Polini M., Goncharuk N.A., MacDonald A.H., Sawicki M., Rushforth A.W., Campion R.P., Zhao L.X., Foxon C.T., and Gallagher B.L. Phys. Rev. B 72 (2005) 165204
18. Grandidier B., Nys J.P., Delerue C., Stievenard D., Higo Y., and Tanaka M. Appl. Phys. Lett. 77 (2000) 4001
19. Tsuruoka T., Tanimoto R., Tachikawa N., Ushioda S., Matsukura F., and Ohno H. Solid State Commun. 121 (2002) 79
20. Gleason J.N., Hjelmstad M.E., Dasika V.D., Goldman R.S., Fathpour S., Charkrabarti S., and Bhattacharya P.K. Appl. Phys. Lett. 86 (2005) 011911
21. Fay M.W., Han Y., Brown P.D., Edmonds K.W., Wang K., Gallagher B.L., Campion R.P., and Foxon C.T. Philos. Mag. Lett. 86 (2006) 395
22. Zhao L.X., Campion R.P., Fewster P.F., Martin R.W., Ya Ber B., Kovarsky A.P., Staddon C.R., Wang K.Y., Edmonds K.W., Foxon C.T., and Gallagher B.L. Semicond. Sci. Technol. 20 (2005) 369
23. Xu J.F., Thibado P.M., Awo-Affouda C., Ramos F., and LaBella V.P. J. Vac. Sci. Technol. B 25 (2007) 1476
24. 〈http://www.cameca.com/doc_en_pdf/lawatap_flyer6pjuly07_web.pdf〉.