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Volumn 57, Issue 7, 2009, Pages 2328-2338
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Substrate heterostructure effects on interface composition, microstructure development and functional properties of PZT thin films
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Author keywords
Depth profiling; Interface; PZT; XPS
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Indexed keywords
ATOMIC SPECTROSCOPY;
DEPTH PROFILING;
HETEROJUNCTIONS;
LEAD;
LEAD ALLOYS;
MANGANESE COMPOUNDS;
OXIDE MINERALS;
PEROVSKITE;
PHASE INTERFACES;
PIEZOELECTRIC ACTUATORS;
PIEZOELECTRIC MATERIALS;
PIEZOELECTRIC TRANSDUCERS;
PLATINUM;
SEMICONDUCTING LEAD COMPOUNDS;
SEMICONDUCTING SILICON COMPOUNDS;
SUBSTRATES;
TEXTURES;
THIN FILMS;
ZIRCONIUM;
ATOMIC FORCES;
DIELECTRIC AND FERROELECTRIC PROPERTIES;
DIFFERENT SUBSTRATES;
ELECTRON TRANSFERS;
FILM ORIENTATIONS;
FUNCTIONAL PROPERTIES;
HETEROSTRUCTURE;
HETEROSTRUCTURES;
INTERDIFFUSION LAYERS;
INTERFACE;
INTERFACE COMPOSITIONS;
INTERFACIAL LAYERS;
INTERMETALLIC LAYERS;
INTERMETALLIC PHASE;
LATTICE-MATCHING;
LIQUID-PHASE DEPOSITIONS;
MICROSTRUCTURE DEVELOPMENT;
NEGATIVE SHIFTS;
PEAK POSITIONS;
PEROVSKITE THIN FILMS;
PZT;
PZT THIN FILMS;
SILICON SUBSTRATES;
THICKNESS DEPENDENCES;
X- RAY DIFFRACTIONS;
X-RAY PHOTOELECTRON SPECTROSCOPIES;
XPS;
XPS DEPTH PROFILING;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 61849181016
PISSN: 13596454
EISSN: None
Source Type: Journal
DOI: 10.1016/j.actamat.2009.02.005 Document Type: Article |
Times cited : (24)
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References (48)
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