Thickness dependence of the structure of a-C:H thin films prepared by rf-CVD evidenced by Raman spectroscopy

Journal of Non-Crystalline Solids

Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 1348-1351

  Veres, M ^a   Toth S ^a   Fule M ^a   Koos M ^a  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

Author keywords

Carbon; Chemical vapor deposition; Diamond like carbon; Raman scattering

Indexed keywords

AMORPHOUS FILMS; BENZENE; CARBON; CHEMICAL VAPOR DEPOSITION; HYDROGENATION; RAMAN SPECTROSCOPY; SUBSTITUTION REACTIONS;

AMORPHOUS CARBON MATRIX; BONDING CONFIGURATION; DIAMOND LIKE CARBON; ION ENERGIES;

THIN FILMS;

EID: 33745431745     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2006.01.027     Document Type: Article

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