Dry etching characteristics of GaN for blue/green light-emitting diode fabrication

Applied Surface Science

Volumn 255, Issue 11, 2009, Pages 5948-5951

  Baik, K H ^a   Pearton, S J ^a  

^a University of Florida   (United States)

Author keywords

Dry etching; GaN

Indexed keywords

CHLORINE; CHLORINE COMPOUNDS; FLOW OF GASES; GALLIUM NITRIDE; III-V SEMICONDUCTORS; LIGHT EMITTING DIODES; SAPPHIRE; SEMICONDUCTOR QUANTUM WELLS; SILICA;

CL2/AR PLASMA; ETCHING CHARACTERISTICS; LIGHT EXTRACTION; MESA SIDEWALL; PLASMA CHEMISTRIES; QUANTUM WELL LIGHT EMITTING DIODES; SAPPHIRE SUBSTRATES; SIDEWALL PROFILES;

DRY ETCHING;

EID: 60949101284     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.01.041     Document Type: Article

References (29)

1. Chichibu S.F., Kawakami Y., and Sota T. In: Nakamura S., and Chichibu S.F. (Eds). Introduction to Nitride Semi-conductor Blue Lasers and Light Emitting Diodes (2000), Taylor and Francis, New York Chapter 5
2. Schubert E.F. Light-emitting Diodes (2003), Cambridge University Press, New York
3. See, for example,. Zukauskas A., Shur M.S., and Gaska R. Introduction to Solid-State Lighting (2002), Wiley and Sons, New York
4. Cao X.A., and Arthur S.D. Appl. Phys. Lett. 85 (2004) 3971
5. Cao X.A., Teetsov J.M., D'Evelyn M.P., Merfeld D.W., and Yan C.H. Appl. Phys. Lett. 85 (2004) 7
6. Kang B.S., Wang H.T., Ren F., and Pearton S.J. J. Appl. Phys. 104 (2008) 031101
7. Shul R.J., Zhang L., Baca A.G., Willison C.G., Han J., Pearton S.J., and Ren F. J. Vac. Sci. Technol., A 18 (2000) 1139
8. Hahn Y.B., Choi R.J., Hong J.H., Park H.J., Choi C.S., and Lee H.J. J. Appl. Phys. 92 (2002) 1189
9. Smith S.A., Wolden C.A., Bremser M.D., Hanser A.D., Davis R.F., and Lambert W.V. Appl. Phys. Lett. 71 (1997) 3631
10. Pearton S.J., Shul R.J., and Ren F. MRS Internet J. Nitride Semicond. Res. 5 (2000) 11
11. Shul R.J., McClellan G.B., Pearton S.J., Abernathy C.R., Constantine C., and Barratt C. Electron. Lett. 32 15 (1996) 1408
12. Park H.J., Choi R.J., Hahn Y.B., Im Y.H., and Yoshikawa A. J. Korean Phys. Soc. 42 (2003) 385
13. Cho B.C., Im Y.H., Park J.S., Jeong T., and Hahn Y.B. J. Korean Phys. Soc. 37 (2000) 23
14. Remashan K., chua S.J., Ramam A., Prakash S., and Liu W. Semicond. Sci. Technol. 15 (2000) 386
15. Oh C.S., Kim T.H., Lim K.Y., and Yang J.W. Semicond. Sci. Technol. 19 (2004) 172
16. Han S.Y., Yang H.S., Baik K.H., Pearton S.J., and Ren F. Jpn. J. Appl. Phys. 44 (2005) 7234
17. Yang H.S., Han S.Y., Baik K.H., Pearton S.J., and Ren F. Appl. Phys. Lett. 86 (2005) 102104
18. Kim H.S., Dawson M.D., and Yeom G.Y. J. Korean Phys. Soc. 40 (2002) 567
19. Song I.J., Lee S.K., Lee K., Park S.S., and Han J.Y. Jpn. J. Appl. Phys. 41 (2002) L317
20. Popa V., Tiginyanu I., Volciuc O., Sarua A., Kuball M., and Heard P. Mater. Lett. 62 (2008) 4576
21. Kim H., Baik K.H., Kim K.K., Lee S.N., Sone C., Park Y., and Seong T.Y. IEEE Photonics Technol. Lett. 19 (2007) 1562
22. Kim H., Baik K.H., Cho J., Lee J.W., Yoon S., Lee S.N., Sone C., and Park Y. IEEE Photonics Technol. Lett. 19 (2007) 336
23. Waki I., Iza M., Speck J.S., Denbaars S.P., and Shuji N. Jpn. J. Appl. Phys. 45 (2006) 720
24. Rizzi F., Gu E., Dawson M.D., and Watson I.M. J. Vac. Sci. Technol., A 25 (2007) 2
25. Tadatomo K., Okagawa H., Ohuchi Y., Tsunekawa T., Imada Y., Kato M., and Taguchi T. Jpn. J. Appl. Phys. 40 6B (2001) L583
26. Jeong C.H., Kim D.W., Kim K.N., and Yeom G.Y. Jpn. J. Appl. Phys. 42 (2002) 6202
27. Kim D.W., Jeong C.H., Kim K.N., Lee H.Y., Kim H.S., Sung Y.J., and Yeom G.Y. Thin Solid Films 435 (2003) 242
28. Pissadakis S., Bohme R., and Zimmer K. Opt. Express 15 (2007) 1428
29. Cho J., Kim H.S., Kim H.K., Yoon S.H., Sone C.S., Park Y.J., and Yoon E.J. Phys. Status Solidi (c) 2 (2005) 2874