Aluminum gettering of iron in silicon as a problem of the ternary phase diagram

Applied Physics Letters

Volumn 94, Issue 6, 2009, Pages

  Abdelbarey, D ^a   Kveder, V ^a,b   Schroter W ^a   Seibt, M ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b INSTITUTE OF SOLID STATE PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; DEEP LEVEL TRANSIENT SPECTROSCOPY; PHASE DIAGRAMS; SEGREGATION (METALLOGRAPHY); SOLUBILITY; SURFACE SEGREGATION; TERNARY SYSTEMS;

ALUMINUM GETTERING; BASIC MECHANISMS; DEEP LEVELS; ORDERS OF MAGNITUDES; PHOTO VOLTAICS; SEGREGATION COEFFICIENTS; TERNARY PHASE DIAGRAMS; TRANSIENT SPECTROSCOPIES;

SILICON;

EID: 60349121773     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3080666     Document Type: Article

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