Microtribological properties of silicon and silicon coated with diamond like carbon, octadecyltrichlorosilane and stearic acid cadmium salt films: A comparative study

Thin Solid Films

Volumn 381, Issue 1, 2001, Pages 135-142

  Liu, Huiwen ^a   Imad Uddin Ahmed, S ^a   Scherge, Matthias ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; APPROXIMATION THEORY; FRICTION; INTERFACES (MATERIALS); LANGMUIR BLODGETT FILMS; MICROELECTROMECHANICAL DEVICES; MONOLAYERS; SHEAR STRENGTH; TRIBOLOGY;

DIAMOND-LIKE CARBONS; MICROTRIBOLOGY; SELF-ASSEMBLED MONOLAYERS;

AMORPHOUS FILMS;

EID: 0342468952     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01546-7     Document Type: Article

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