Adhesion and friction studies of a selectively micro/nano-textured surface produced by UV assisted crystallization of amorphous silicon

Tribology Letters

Volumn 20, Issue 1, 2005, Pages 43-52

  Zou, M ^a   Cai, L ^a   Wang, H ^a   Yang, D ^b   Wyrobek, T ^b  

^a 3202 Bell Engineering Center   (United States)

^b Bruker Corporation   (United States)

Author keywords

Crystallization of amorphous silicon; Micro texture; Nano texture; Selective surface texturing; Surface texturing

Indexed keywords

CRYSTALLIZATION;

EID: 27744447456     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-005-7791-3     Document Type: Article

References (20)

1. Micro and Nanotech Industry Review, Business Communications Co., http://www.mindbranch.com/listing/product/R2-663.html, March 2003
2. K. Komvopoulos 2003 J. Adhesion Sci. Technol. 17 47710.1163/ 15685610360554384
3. R. Maboudian and R.T. Howe 1997 J. Vac. Sci. Technol. B15 1
4. R.E. Sulouff 1998, in: B. Bhushan, ed. Tribology Issues and Opportunities in MEMS Kluwer Academic Dordrecht, Netherlands 109
5. M.R. Douglass, 36th IEEE International Reliability Physics Symposium Proceedings, IEEE, New York (1998) 9
6. L.J. Hornbeck 2001 MRS Bull. 26 325
7. V.N. Koinkar and B. Bhushan 1997 J. Appl. Phys. 81 247210.1063/1.363954
8. S. Sundararajan and B. Bhushan 2000 J. Appl. Phys. 88 482510.1063/ 1.1310187
9. N.A. Burnham and A.J. Kulik 1998 B. Bhushan Handbook of Micro/ Nanotribology 2 CRC Press Boca Raton 247
10. R.L. Alley P. Mai K. Komvopoulos and R.T. Howe 1993 Proc. 7th Int. Conf. Solid-State Sensors and Actuators, Transducers '93 Yokohama Japan 288
11. Y. Yee K. Chu J.D. Lee 1995 Proc. 8th Int. Conf. Solid-State Sensors and Actuators, Transducers '95 - Eurosensors IX 1 (Stockholm Sweden) 206
12. R. Maboudian and R.T. Howe 1997 Tribol. Lett. 3 21510.1023/ A:1019185206471
13. J. Kim and C.-J. Kim 2002 Technical Digest IEEE Conference on MEMS Las Vegas, NV 479
14. B. Pivac M. Pavlovic I. Kovacevic B. Etlinger and I. Zulim 2003 Vacuum 71 13510.1016/S0042-207X(02)00727-3
15. E. Yoon S.H. Yang H. Han and H. Kong 2003 Wear 254 97410.1016/ S0043-1648(03)00302-8
16. B. Bhushan and X. Li 1997 J. mater. Res. 12 54
17. F.P. Bowden and D. Tabor 1986 The Friction and Lubrication of Solids Clarendon Press Oxford
18. N.P. Suh and H.-C. Sin 1981 Wear 69 9110.1016/0043-1648(81)90315-X
19. K. Komvopoulos N. Saka and N.P. Suh 1985 ASME J. Tribol. 107 452
20. K. Komvopoulos N. Saka and N.P. Suh 1986 ASME J. Tribol. 108 301