Plasma deposition of tetraethoxysilane on polycarbonate membrane for pervaporation of tetrafluoropropanol aqueous solution

Journal of Membrane Science

Volumn 329, Issue 1-2, 2009, Pages 138-145

  Lo, Chia Hao ^a   Hung, Wei Song ^a   Huang, Shu Hsien ^a,b   De Guzman, Manuel ^a   Rouessac, V ^c   Lee, Kueir Rarn ^a   Lai, Juin Yih ^a  

^a CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

^b NATIONAL ILAN UNIVERSITY   (Taiwan)

^c UNIVERSITÉ DE MONTPELLIER   (France)

Author keywords

Pervaporation; Plasma deposition; Positron annihilation spectroscopy (PAS); Tetraethoxysilane (TEOS); Tetrafluoropropanol (TFP)

Indexed keywords

AQUEOUS SOLUTIONS; CHEMICAL AND PHYSICAL CHARACTERISTICS; DEPOSITION LAYERS; DEPOSITION TIME; FOURIER TRANSFORM INFRARED; LOW POROSITIES; PERMEATION RATES; PLASMA POWER; PLASMA TREATMENTS; POLYCARBONATE MEMBRANES; POSITRON ANNIHILATION SPECTROSCOPY (PAS); SLOW POSITRON BEAMS; TETRAETHOXYSILANE (TEOS); TETRAFLUOROPROPANOL (TFP); VOLUME VARIATIONS; WATER CONCENTRATIONS; WATER SELECTIVITIES; X-RAY PHOTOELECTRON SPECTROSCOPIES;

CHEMICAL VAPOR DEPOSITION; COMPOSITE MEMBRANES; DEPOSITION; ELECTRONS; EVAPORATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; FREE VOLUME; INFRARED SPECTROSCOPY; MAGNESIUM PRINTING PLATES; MEMBRANES; PERVAPORATION; PHOTOACOUSTIC SPECTROSCOPY; PHOTOELECTRON SPECTROSCOPY; PLASMA APPLICATIONS; PLASMAS; POSITRON ANNIHILATION; POSITRON ANNIHILATION SPECTROSCOPY; POSITRONS; SILICON COMPOUNDS; SPECTROSCOPIC ANALYSIS; SPECTROSCOPY; SPECTRUM ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA DEPOSITION;

MONOMER; POLYCARBONATE; PROPANOL; TETRAETHOXYSILANE; TETRAFLUOROPROPANOL; UNCLASSIFIED DRUG; WATER;

AQUEOUS SOLUTION; ARTICLE; ENZYME SUBSTRATE; INFRARED SPECTROSCOPY; MEMBRANE; PERVAPORATION; PHYSICAL CHEMISTRY; PLASMA; POROSITY; POSITRON ANNIHILATION SPECTROSCOPY; PRIORITY JOURNAL; SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 59849113744     PISSN: 03767388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.memsci.2008.12.029     Document Type: Article

References (24)

1. http://www.chenguang-chemi.com/TFP.htm.
2. Lee K.R., Yu S.J., Huang S.L., Wang D.M., and Lai J.Y. Pervaporation of water-ethanol mixtures through plasma graft polymerization of polar monomer onto crosslinked polyurethane membrane. J. Appl. Polym. Sci. 67 (1998 1789)
3. Wang Y.C., Li C.L., Huang J., Lin C., Lee K.R., Liaw D.J., and Lai J.Y. Pervaporation of benzene/cyclohexane mixtures through aromatic polyamide membranes. J. Membr. Sci. 185 (2001) 193
4. Wang K.Y., Chung T.S., and Rajagopalan R. Dehydration of tetrafluoropropanol (TFP) by pervaporation via novel PBI/BTDA-TDI/MDI co-polyimide (P84) dual-layer hollow fiber membranes. J. Membr. Sci. 287 (2007) 60
5. Asaeda M., Yang J., and Sakou Y. Porous silica-zirconia (50%) membranes for pervaporation of iso-propyl alcohol (IPA)/water mixtures. J. Chem. Eng. Jpn. 35 (2002) 365
6. Asaeda M., Sakou Y., Yang J., and Shimasaki K. Stability and performance of porous silica-zirconia composite membranes for pervaporation of aqueous organic solutions. J. Membr. Sci. 209 (2002) 163
7. Zuri L., Silverstein M.S., and Narkis M. Organic-inorganic character of plasma-polymerized hexamethyldisiloxane. J. Appl. Polym. Sci. 62 (1996) 2147
8. Chen H., Hung W.S., Lo C.H., Huang S.H., Cheng M.L., Liu G., Lee K.R., Lai J.Y., Sun Y.M., Hu C.C., Suzuki R., Ohdaira T., Oshima N., and Jean Y.C. Free-volume depth profile of polymeric membranes studied by positron annihilation spectroscopy: layer structure from interfacial polymerization. Macromolecules 40 (2007) 7542
9. Ito K., and Kobayashi Y. Variable-energy positron annihilation as highly sensitive nanoporosimetry for porous thin films. Acta Phys. Pol. A 107 (2005) 717
10. Jean Y.C., Mallon P.E., and Schrader D.M. Principles and Applications of Positron and Positronium Chemistry (2003), World Scientific Publishing Co. Pte. Ltd.
11. Kim M.C., Cho S.H., Lee S.B., Kim Y., and Boo J.H. Characterization of polymer-like thin films deposited on silicon and glass substrates using PECVD method. Thin Solid Films 447-448 (2004) 592
12. 2 thin films: effect of growth temperature and plasma gas composition. Thin Solid Films 371 (2000) 126
13. Yasuda H. Plasma Polymerization (1985), Academic Press, London
14. Roualdes S., der Lee A.V., Berjoan R., Sanchez J., and Durand J. Gas separation properties of organosilicon plasma polymerized membranes. AIChE J. 45 (1999) 1566
15. Teshima K., Inoue Y., Sugimura H., and Takai O. Reduction of carbon impurities in silicon oxide films prepared by RF plasma-enhanced CVD. Thin Solid Films 390 (2001) 88
16. Kurosawa S., Choi B.G., Park J.W., Aizawa H., Shim K.B., and Yamamoto K. Synthesis and characterization of plasma-polymerized hexamethyldisiloxane films. Thin Solid Films 506-507 (2006) 176
17. Kashiwagi K., Yoshida Y., and Murayama Y. Hybrid films formed from hexamethyldisiloxane and SiO by plasma process. Jpn. J. Appl. Phys. 30 (1991 1803)
18. Grill A., and Neumayer D.A. Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization. J. Appl. Phys. 94 (2003) 6697
19. Agres L., Segui Y., Delsol R., and Raynaud P. Oxygen barrier efficiency of hexamethyldisiloxane/oxygen plasma-deposited coating. J. Appl. Polym. Sci. 61 (1996 2015)
20. Wang C.L., Kobayashi Y., Togashi H., Kato K., Hirotsu T., Hirata K., Suzuki R., Ohdaira T., and Mikado T. Plasma-polymerized hexamethyldisiloxane films characterized by variable-energy positron lifetime spectroscopy. J. Appl. Polym. Sci. 74 (1999) 2522
21. 2 using novel alkoxysilane precursors. J. Vac. Sci. Technol. A 13 (1995) 476
22. Oka T., Ito K., Muramatsu M., Ohdaira T., Suzuki R., and Kobayashi Y. Porogen approach for the fabrication of plasma-polymerized nanoporous polysiloxane films. J. Phys. Chem. B 110 (2006) 20172
23. Ito K., Oka T., Kobayashi Y., Suzuki R., and Ohdaira T. Variable-energy positron annihilation study of subnanopores in SiOCH-based PECVD films. Radiat. Phys. Chem. 76 (2007) 213
24. van Veen A., Schut H., Clement M., de Nijs J.M.M., Kruseman A., and Ijpma M.R. VEPFIT applied to depth profiling problems. Appl. Surf. Sci. 85 (1995) 216