Fatigue behavior of thin Au and Al films on polycarbonate and polymethylmethacrylate for micro-optical components

Thin Solid Films

Volumn 517, Issue 8, 2009, Pages 2702-2707

  Eve, S ^a   Huber, N ^a   Last, A ^a   Kraft, O ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Mechanical fatigue; Micro optical components; Polymer substrate; Thermal fatigue; Thin metal film

Indexed keywords

ALUMINA; ELECTRODEPOSITION; FATIGUE DAMAGE; FATIGUE TESTING; FILMS; GOLD; LITHIUM COMPOUNDS; METALLIC FILMS; POLYESTERS; POLYMER FILMS; POLYMERS; SCANNING ELECTRON MICROSCOPY; THERMAL FATIGUE; WELDS;

AL FILMS; ALUMINUM FILMS; BI-AXIAL LOADINGS; DAMAGE MORPHOLOGIES; EXPERIMENTAL SET-UP; FATIGUE BEHAVIORS; MECHANICAL FATIGUE; MECHANICAL FATIGUE TESTING; MECHANICAL LOADINGS; MICRO-OPTICAL COMPONENTS; POLY METHYL METHACRYLATES; POLYMER SUBSTRATE; SCANNING ELECTRONS; STRAIN STATE; THERMAL AND MECHANICAL CYCLING; THIN METAL FILM; TIME TO FAILURES;

SUBSTRATES;

EID: 59149083765     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.12.018     Document Type: Article

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