Temperature distribution in multilayers covered by liquid layer and processed by focused laser beam

Applied Surface Science

Volumn 106, Issue , 1996, Pages 422-428

  Geretovszky, Zs ^a   Kelemen, L ^b   Piglmayer, K ^c  

^a RESEARCH GROUP ON LASER PHYSICS   (Hungary)

^b UNIVERSITY OF SZEGED   (Hungary)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE DIFFERENCE METHOD; GAS LASERS; LASER BEAM EFFECTS; MATHEMATICAL MODELS; TEMPERATURE DISTRIBUTION; THERMAL EFFECTS; THERMODYNAMIC PROPERTIES;

DISCRETIZATION PROCEDURE; SECOND ORDER FINITE DIFFERENCE METHOD; SPATIAL TEMPERATURE DISTRIBUTION;

MULTILAYERS;

EID: 0030565982     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00421-7     Document Type: Article

References (18)

1. I.W. Boyd and R.B. Jackman, Photochemical Processing of Electronic Materials, 1st ed. (Academic Press, London, 1992).
2. D.J. Elliott, Microlithography: Process Technology for IC Fabrication, 1st ed. (McGraw-Hill, New York, 1986).
3. I.P. Herman, in: Laser Chemical Processing for Microelectronics, Eds. K.G. Ibbs and R.M. Osgood (Cambridge University Press, 1989) p. 61.
4. T.T. Kodas, T.H. Baum and P.B Comita, J. Appl. Phys. 61 (1987) 2749.
5. M.J.J. Theunissen, R.P.M.L.C. van de Nieuwenhoff and H.K. Kuiken, J. Appl. Phys. 68 (1990) 806.
6. M, von Allmen, Laser-Beam Interactions with Materials, 1st ed. (Springer, Berlin, 1987).
7. D.J. Sanders, Appl. Opt. 23 (1984) 30.
8. J. Ascough, Opt. Lasers Eng. 6 (1985) 137
9. A.H.M. Holtslag, J. App. Phys. 66 (1989) 1530.
10. J.E. Moody and R.H. Hendel, J. Appl. Phys. 53 (1982) 4364.
11. Y.I. Nissim, A. Lietoila, R.B. Gold and J.F. Gibbons, J. Appl. Phys. 51 (1980) 274.
12. T.T. Rantala and J. Levoska, J. Appl. Phys. 65 (1989) 4475.
13. C. Garrido, B. León and M. Pérez-Amor, J. Appl. Phys. 69 (1991) 1133.
14. G. Auvert, Appl. Surf. Sci. 86 (1995) 466.
15. S. Pflüger, M. Wehner, F. Jansen, Th. Kruck and F. Lupp, Appl. Surf. Sci. 86 (1995) 504.
16. Zs. Geretovszky, L. Kelemen, K. Bali and T. Szörényi, Appl. Surf. Sci. 86 (1995) 495.
17. S.V. Patankar, Numerical Heat Transfer and Fluid Flow, 1st ed. (Hemisphere, Washington, DC, 1980).
18. G.D. Smith, Numerical Solution of Partial Differential Equations: Finite Difference Methods, 2nd ed. (Oxford University Press, New York, 1978).