Nanohole 3D-size tailoring through polystyrene bead combustion during thin film deposition

Applied Surface Science

Volumn 255, Issue 8, 2009, Pages 4384-4388

  Peng, Xiaofeng ^a   Kamiya, Itaru ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

Colloidal quantum dots; Combustion; Nanohole; Nanolithography; Polystyrene beads; Thin film deposition

Indexed keywords

ALUMINA; ALUMINUM OXIDE; CHARACTERIZATION; COMBUSTION; DEPOSITION RATES; FILM PREPARATION; GOLD COMPOUNDS; NANOCRYSTALS; NANOLITHOGRAPHY; PLATINUM COMPOUNDS; POLYSTYRENES; SEMICONDUCTOR QUANTUM DOTS; SILICA; SILICON OXIDES; SILICON WAFERS;

COATING MATERIAL; COLLOIDAL QUANTUM DOTS; COMBUSTION SPEED; FILM DEPOSITION RATES; NANOHOLES; POLYSTYRENE BEADS; SINGLE QUANTUM DOT; THIN-FILM DEPOSITIONS;

THIN FILMS;

EID: 58349121435     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.10.128     Document Type: Article

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