Optical and electrical properties of indium tin oxide thin films sputter-deposited in working gas containing hydrogen without heat treatments

Materials Letters

Volumn 63, Issue 6-7, 2009, Pages 641-643

  Luo, Suning ^a,b   Okada, Koichi ^a   Kohiki, Shigemi ^a   Tsutsui, Fuki ^a   Shimooka, Hirokazu ^a   Shoji, Fumiya ^c  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

^b LIAONING UNIVERSITY OF TECHNOLOGY   (China)

^c KYUSHU KYORITSU UNIVERSITY   (Japan)

Author keywords

Carrier transport; Hydrogen; Indium tin oxide; Optical transmittance

Indexed keywords

CARRIER CONCENTRATION; CIVIL AVIATION; ELECTRIC PROPERTIES; GAS ABSORPTION; HEAT TREATMENT; INDIUM; NONMETALS; OPACITY; OPTICAL PROPERTIES; OXIDE FILMS; PHOTOLITHOGRAPHY; THIN FILMS; TIN; TITANIUM COMPOUNDS;

CARRIER DENSITIES; HYDROGEN CONCENTRATIONS; INDIUM TIN OXIDE; INDIUM TIN OXIDE THIN FILMS; OPTICAL ABSORPTION ENERGIES; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL TRANSMITTANCE; POLYCRYSTALLINE THIN FILMS; ROOM TEMPERATURES; VISIBLE LIGHTS; WORKING GASSES;

HYDROGEN;

EID: 58349091879     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2008.12.008     Document Type: Article

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