SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 324, Issue 1-2, 1998, Pages 214-218

The effects of deposition rate and substrate temperature of ITO thin films on electrical and optical properties

(1) Salehi, A a

a K N TOOSI UNIVERSITY OF TECHNOLOGY (Iran)

Author keywords

Deposition rate; Indium Tin Oxide; Opto electronics; Reflectance; Resistivity; Substrate temperature; Transmittance

Indexed keywords

COMPOSITION EFFECTS; DEPOSITION; ELECTRIC PROPERTIES; INDIUM COMPOUNDS; LIGHT TRANSMISSION; OPTICAL PROPERTIES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION;

INDIUM TIN OXIDE FILMS;

METALLIC FILMS;

EID: 0032122140 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)00371-X Document Type: Article

Times cited : (128)

References (13)

1
- 0026903131
- J.W. Seo, A.A. Ketterson, D.G. Ballegeer, K.Y. Cheng, I. Adeside, X. Li, T. Gessert, IEEE, Photonic Technol. Lett. 4 (8) (1992) 888-890.
- (1992) IEEE, Photonic Technol. Lett. , vol.4 , Issue.8 , pp. 888-890
- Seo, J.W.¹ Ketterson, A.A.² Ballegeer, D.G.³ Cheng, K.Y.⁴ Adeside, I.⁵ Li, X.⁶ Gessert, T.⁷

2
- 21344494366
- W. Fukarek, H. Kersten, J. Vac. Sci. Technol. A 12 (12) (1994) 523-528.
- (1994) J. Vac. Sci. Technol. A , vol.12 , Issue.12 , pp. 523-528
- Fukarek, W.¹ Kersten, H.²

3
- 0027662592
- J.P. Zheng, H.S. Kwok, Thin Solid Films 232 (1993) 99-104.
- (1993) Thin Solid Films , vol.232 , pp. 99-104
- Zheng, J.P.¹ Kwok, H.S.²

4
- 0009350624
- D.V. Morgan, A. Salehi, Y.H. Aliyu, R.W. Bunce, D. Diskett, Thin Solid Films 258 (1995) 283-285.
- (1995) Thin Solid Films , vol.258 , pp. 283-285
- Morgan, D.V.¹ Salehi, A.² Aliyu, Y.H.³ Bunce, R.W.⁴ Diskett, D.⁵

5
- 0028445418
- K. Ichihara, N. Inoue, M. Okubo, Yasuda, Thin Solid Films 245 (1994) 152-156.
- (1994) Thin Solid Films , vol.245 , pp. 152-156
- Ichihara, K.¹ Inoue, N.² Okubo, M.³ Yasuda⁴

6
- 0027805745
- L. Davis, Thin Solid Films 236 (1993) 1-5.
- (1993) Thin Solid Films , vol.236 , pp. 1-5
- Davis, L.¹

7
- 0027542134
- W.K. Lee, T. Machino, T. Sugihara, Thin Solid Films 224 (1993) 105-111.
- (1993) Thin Solid Films , vol.224 , pp. 105-111
- Lee, W.K.¹ Machino, T.² Sugihara, T.³

8
- 0025472351
- J.L. Yao, S. Hao, J.S. Wilkinson, Thin Solid Films 189 (1990) 227-233.
- (1990) Thin Solid Films , vol.189 , pp. 227-233
- Yao, J.L.¹ Hao, S.² Wilkinson, J.S.³

9
- 0027699099
- Solar Energy Mater
- S. Naseem, M. Igbal, K. Hussain, Solar Energy Mater. Solar Cells 31 (1993) 155-162.
- (1993) Solar Cells , vol.31 , pp. 155-162
- Naseem, S.¹ Igbal, M.² Hussain, K.³

10
- 0031139442
- P. Thilakan, J. Kumar, Vacuum 48 (5) (1997) 463-466.
- (1997) Vacuum , vol.48 , Issue.5 , pp. 463-466
- Thilakan, P.¹ Kumar, J.²

11
- 0024303771
- N. Balsubramanian, A. Subrahmanyam, J. Phys. D 22 (1989) 206-209.
- (1989) J. Phys. D , vol.22 , pp. 206-209
- Balsubramanian, N.¹ Subrahmanyam, A.²

12
- 0024055160
- J. Dutta, S. Ray, Thin Solid Films 162 (1988) 119-127.
- (1988) Thin Solid Films , vol.162 , pp. 119-127
- Dutta, J.¹ Ray, S.²

13
- 0023643199
- K. Ito, T. Nakazawa, K. Osaki, Thin Solid Films 151 (1987) 215-222.
- (1987) Thin Solid Films , vol.151 , pp. 215-222
- Ito, K.¹ Nakazawa, T.² Osaki, K.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.