Transparent conductive oxide semiconductor ZnO:Al films produced by magnetron reactive sputtering

Materials Research Society Symposium - Proceedings

Volumn 666, Issue , 2001, Pages F121-F126

  Chen, Meng ^a,b   Pei, Zhiliang ^b   Wang, Xi ^a   Sun, Cao ^b   Wen, Lishi ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b INSTITUTE OF METAL RESEARCH   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CARRIER MOBILITY; CONDUCTIVE FILMS; ENERGY GAP; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SEMICONDUCTOR DOPING; SPUTTER DEPOSITION; SUBSTRATES; THERMAL EFFECTS; ZINC OXIDE;

SUBSTRATE TEMPERATURE;

SEMICONDUCTING FILMS;

EID: 0035557171     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)