SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Volumn 78, Issue 2-4, 2005, Pages 569-575

X-ray diffraction studies of GaAs implanted with 1.5 MeV Se+ ions

(5) Wierzchowski, Wojciech a Wieteska, Krzysztof b Graeff, Walter c Turos, Andrzej a,d Grötzschel, Reiner e

a ukasiewicz Research Network Institute of Microelectronics and Photonics (Poland)

b INSTITUTE OF ATOMIC ENERGY (Poland)

c DESY (Germany)

d SOLTAN INSTITUTE FOR NUCLEAR STUDIES (Poland)

e INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

GaAs; Ion implantation; X ray diffraction

Indexed keywords

AMORPHIZATION; CONCENTRATION (PROCESS); HEAVY IONS; ION IMPLANTATION; NUMERICAL ANALYSIS; SYNCHROTRON RADIATION; X RAY DIFFRACTION ANALYSIS;

CRYSTAL BEHAVIOR; ION-INDUCED STRAIN; MONOCHROMATIC BEAMS; STRAIN MODULATION FRINGES (SMF);

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 18444408391 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2005.01.088 Document Type: Conference Paper

Times cited : (8)

References (22)

1
- 0004039668
- M. Fatemi, P.E. Thompson, J. Chaudhuri, and S. Shah J Appl Phys 68 1990 3967
- (1990) J Appl Phys , vol.68 , pp. 3967
- Fatemi, M.¹ Thompson, P.E.² Chaudhuri, J.³ Shah, S.⁴

2
- 0002390759
- M.W. Bench, I.M. Robertson, M.A. Kirk, and I. Jenčič J Appl Phys 87 2000 49
- (2000) J Appl Phys , vol.87 , pp. 49
- Bench, M.W.¹ Robertson, I.M.² Kirk, M.A.³ Jenčič, I.⁴

3
- 0001020382
- R.A. Brown, and J.S. Williams J Appl Phys 81 1997 7681
- (1997) J Appl Phys , vol.81 , pp. 7681
- Brown, R.A.¹ Williams, J.S.²

4
- 30244562000
- T.E. Haynes, and O.W. Holland Appl Phys Lett 59 1991 452
- (1991) Appl Phys Lett , vol.59 , pp. 452
- Haynes, T.E.¹ Holland, O.W.²

5
- 0041302792
- T.E. Haynes, and O.W. Holland Appl Phys Lett 58 1991 62
- (1991) Appl Phys Lett , vol.58 , pp. 62
- Haynes, T.E.¹ Holland, O.W.²

6
- 0000724394
- F. Xiong, C.J. Tsai, T. Vreeland, T.A. Tombrello, C.L. Schwartz, and S.A. Schwarz J Appl Phys 69 1991 2964
- (1991) J Appl Phys , vol.69 , pp. 2964
- Xiong, F.¹ Tsai, C.J.² Vreeland, T.³ Tombrello, T.A.⁴ Schwartz, C.L.⁵ Schwarz, S.A.⁶

7
- 1542607313
- J. Jasiński Acta Phys Pol A90 1996 825
- (1996) Acta Phys Pol , vol.90 , pp. 825
- Jasiński, J.¹

8
- 0000979513
- A.P. Knights, S. Ruffeil, and P.J. Simpson J Appl Phys 87 2000 663
- (2000) J Appl Phys , vol.87 , pp. 663
- Knights, A.P.¹ Ruffeil, S.² Simpson, P.J.³

9
- 0038195888
- T. Bachman, S. Schippel, E. Wendler, W. Wesh, U. Richter, and W. Witthuhn Nucl Instrum Methods Phys Res B89 1994 168
- (1994) Nucl Instrum Methods Phys Res , vol.89 , pp. 168
- Bachman, T.¹ Schippel, S.² Wendler, E.³ Wesh, W.⁴ Richter, U.⁵ Witthuhn, W.⁶

10
- 0029492441
- P. Partyka, R.S. Averback, J.J. Coleman, P. Erhart, and W. Jäger Mat Res Soc Symp Proc 354 1995 218
- (1995) Mat Res Soc Symp Proc , vol.354 , pp. 218
- Partyka, P.¹ Averback, R.S.² Coleman, J.J.³ Erhart, P.⁴ Jäger, W.⁵

11
- 36449001280
- H.H. Tan, C. Jagadish, J.S. Wiliams, J. Zou, D.H.J. Cockayne, and A. Sikorski J Appl Phys 77 1995 87
- (1995) J Appl Phys , vol.77 , pp. 87
- Tan, H.H.¹ Jagadish, C.² Wiliams, J.S.³ Zou, J.⁴ Cockayne, D.H.J.⁵ Sikorski, A.⁶

12
- 0001718954
- B.A. Turkot, B.W. Lagow, I.M. Robertson, D.V. Forbes, J.J. Coleman, L.E. Rehn, and P.M. Baldo J Appl Phys 80 1996 4366
- (1996) J Appl Phys , vol.80 , pp. 4366
- Turkot, B.A.¹ Lagow, B.W.² Robertson, I.M.³ Forbes, D.V.⁴ Coleman, J.J.⁵ Rehn, L.E.⁶ Baldo, P.M.⁷

13
- 0000754774
- W. Wierzchowski, K. Wieteska, W. Graeff, and A. Turos J Alloys Comp 286 1999 342
- (1999) J Alloys Comp , vol.286 , pp. 342
- Wierzchowski, W.¹ Wieteska, K.² Graeff, W.³ Turos, A.⁴

14
- 0032598524
- W. Wierzchowski, K. Wieteska, W. Graeff, A. Turos, and R. Grötzschel IEEE Proc SIMC-X Conf 1999 181
- (1999) IEEE Proc SIMC-X Conf , pp. 181
- Wierzchowski, W.¹ Wieteska, K.² Graeff, W.³ Turos, A.⁴ Grötzschel, R.⁵

15
- 0035926613
- K. Wieteska, W. Wierzchowski, W. Graeff, A. Turos, and R. Grötzschel J Phys D: Appl Phys 34 2001 A122
- (2001) J Phys D: Appl Phys , vol.34
- Wieteska, K.¹ Wierzchowski, W.² Graeff, W.³ Turos, A.⁴ Grötzschel, R.⁵

16
- 0035899431
- W. Wierzchowski, K. Wieteska, A. Turos, W. Graeff, G. Gawlik, and R. Grötzschel Vacuum 63 2001 767
- (2001) Vacuum , vol.63 , pp. 767
- Wierzchowski, W.¹ Wieteska, K.² Turos, A.³ Graeff, W.⁴ Gawlik, G.⁵ Grötzschel, R.⁶

17
- 12244313916
- W. Wierzchowski, K. Wieteska, W. Graeff, A. Turos, and R. Grötzschel Vacuum 70 2003 115
- (2003) Vacuum , vol.70 , pp. 115
- Wierzchowski, W.¹ Wieteska, K.² Graeff, W.³ Turos, A.⁴ Grötzschel, R.⁵

18
- 0345328817
- K. Wieteska, W. Wierzchowski, W. Graeff, G. Kuri, A. Misiuk, A. Turos, and G. Gawlik J Alloys Comp 362 2004 297
- (2004) J Alloys Comp , vol.362 , pp. 297
- Wieteska, K.¹ Wierzchowski, W.² Graeff, W.³ Kuri, G.⁴ Misiuk, A.⁵ Turos, A.⁶ Gawlik, G.⁷

19
- 0035302589
- A. Stonert, A. Turos, B. Breeger, E. Wendler, and W. Wesch Nucl Instrum Methods B175-177 2001 219
- (2001) Nucl Instrum Methods , vol.B175-177 , pp. 219
- Stonert, A.¹ Turos, A.² Breeger, B.³ Wendler, E.⁴ Wesch, W.⁵

20
- 0035924751
- A. Stonert, A. Turos, B. Breeger, E. Wendler, and W. Wesch Mod Phys Lett B15 2001 1437
- (2001) Mod Phys Lett , vol.15 , pp. 1437
- Stonert, A.¹ Turos, A.² Breeger, B.³ Wendler, E.⁴ Wesch, W.⁵

21
- 0034985007
- R. Sielemann, H. Haesslein, and Ch. Zistl Phys B: Condens Matter 302-303 2001 101
- (2001) Phys B: Condens Matter , vol.302-303 , pp. 101
- Sielemann, R.¹ Haesslein, H.² Zistl, Ch.³

22
- 0035939249
- T.E.M. Staab, R.M. Nieminen, J. Gebauer, R. Krause-Rehberg, M. Laysberg, M. Haugk, and Th. Frauenheim Phys Rev Lett 87 2001 045504
- (2001) Phys Rev Lett , vol.87 , pp. 045504
- Staab, T.E.M.¹ Nieminen, R.M.² Gebauer, J.³ Krause-Rehberg, R.⁴ Laysberg, M.⁵ Haugk, M.⁶ Frauenheim, Th.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.