Growth and characterization of TiAlNCrAlN superlattices prepared by reactive direct current magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 1, 2009, Pages 29-36

  Barshilia, Harish C ^a   Deepthi, B ^a   Rajam, K S ^a   Bhatti, Kanwal Preet ^b   Chaudhary, Sujeet ^b  

^a SURFACE ENGINEERING DIVISION   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION RESISTANCE; DATA STRUCTURES; ELECTRODEPOSITION; MAGNETRONS; MODULATION; MULTILAYERS; REFLECTION; SCANNING ELECTRON MICROSCOPY; SODIUM CHLORIDE; SUBSTRATES; THERMODYNAMIC STABILITY; TITANIUM COMPOUNDS; X RAY ANALYSIS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

BONDING STRUCTURES; BRAGG'S LAWS; DIRECT CURRENT MAGNETRON SPUTTERING; MAXIMUM HARDNESSES; MILD STEELS; MODULATION WAVELENGTHS; MULTILAYER COATINGS; NANOLAYERED MULTILAYERS; SCANNING ELECTRON MICROSCOPY IMAGES; SHARP INTERFACES; SINGLE LAYERS; STRUCTURAL CHARACTERIZATIONS; SUPERLATTICE STRUCTURES; THERMAL STABILITIES; X-RAY DIFFRACTIONS; X-RAY REFLECTIVITIES; XPS DATUMS; XRD PATTERNS;

COATINGS;

EID: 58149494588     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3013858     Document Type: Article

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