Net shape fabrication of stainless-steel micro machine components from metallic powder

Journal of Micromechanics and Microengineering

Volumn 18, Issue 11, 2008, Pages

  Imbaby, M ^a   Jiang, K ^a   Chang, I ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BINDERS; DISKS (MACHINE COMPONENTS); FABRICATION; HARDNESS; MACHINE COMPONENTS; METALLURGY; MICROCHANNELS; MOLDS; OPTICAL WAVEGUIDES; POWDERS; SHAFTS (MACHINE COMPONENTS); SILICONES; SINTERING; SLURRIES; STEEL; TOKAMAK DEVICES; VICKERS HARDNESS; VICKERS HARDNESS TESTING;

316L STAINLESS STEELS; COMPLEX GEOMETRIES; FABRICATION PROCESSES; FORMING GASSES; G LOADS; HIGH QUALITIES; INDENTER; METALLIC POWDERS; METALLIC SLURRIES; MICRO COMPONENTS; MICRO PARTS; NET SHAPES; SHAPE RETENTIONS; SINTERED SAMPLES; SOFT LITHOGRAPHIES; STEEL POWDERS;

STAINLESS STEEL;

EID: 58149354161     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/11/115018     Document Type: Article

References (24)

1. Buddy D R et al 1996 Biomaterial Science (London: Academic Press)
2. Genolet G and Lorenz H 2004 New functionalities for micromechanical watch parts given by LIGA technology design freedom MST News 2 16-35
3. Filiza S, Xiea L, Weissb L E and Ozdoganlar O B 2008 Micromilling of microbarbs for medical implants Int. J. Mach. Tools Manuf. 48 459-72
4. Meeusen W, Clijnen J, Reynaerts D and Puers R 2003 Micro-electro- discharge machining as microsensor fabrication technology IEEE Sens. J. 3-5 632-9
5. Chi G, Wang Z, Xiao K, Cui J and Jin B 2008 The fabrication of a micro-spiral structure using EDM deposition in the air J. Micromech. Microeng. 18 1-9
6. Moore D F and Williams J A 2004 Laser prototyping of MEMS structures and SiN cantilevers: experience teaching a practical undergraduate course IEE Proc. Sci. Meas. Technol. 151 54-9
7. Youn S, Goto H, Takahashi M, Oyama S, Oshinomi Y, Matsutani K and Maeda R 2008 A replication process of metallic micro-mold by using parylene embossing and electroplating Microelectron. Eng. 85 161-7
8. Hong S H, Lee J H and Lee H 2007 Fabrication of 50 nm patterned nickel stamp with hot embossing and electroforming process Microelectron. Eng. 84 977-9
9. Liou A C and Chen R H 2006 Injection molding of polymer micro- and sub-micron structures with high-aspect ratios Int. J. Adv. Manuf. Technol. 28 1097-103
10. Fu G, Loh N H and Tor S B 2004 Replication of metal microstructures by micro powder injection molding Mater. Des. 25 729-33
11. Gerling R, Aust E, Limberg W, Pfuff M and Schimansky F P 2006 Metal injection moulding of gamma titanium aluminide alloy powder Mater. Sci. Eng. A 423 262-8
12. Gietzelt T, Jacobi O, Piotter V, Ruprecht R and Hausselt J 2004 Development of a micro annular gear pump by micro powder injection molding J. Mater. Sci. 39 2113-9
13. Loh N H, Tor S B, Tay B Y, Murakoshi Y and Maeda R 2008 Fabrication of micro gear by micro powder injection molding Microsyst. Technol. 14 43-50
14. Moon S, Lee N and Kang S 2003 Fabrication of a microlens array using micro-compression molding with an electroformed mold insert J. Micromech. Microeng. 13 98-103
15. Kim J, Jiang K and Chang I 2006 A net shape process for metallic microcomponent fabrication using Al and Cu micro/nano powders J. Micromech. Microeng. 16 48-52
16. Zhu Z, Wei X and Jiang K 2007 A net-shape fabrication process of alumina micro-components using a soft lithography technique J. Micromech. Microeng. 17 193-8
17. Zhang D, Bo S and Button T W 2003 Microfabrication of three-dimensional, free-standing ceramic MEMS components by soft moulding Adv. Eng. Mater. 5 924-7
18. Lin C, Lee G, Chang B and Chang G 2002 A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist J. Micromech. Microeng. 12 590-7
19. Becnel C, Desta Y and Kelly K 2005 Ultra-deep x-ray lithography of densely packed SU-8 features: an SU-8 casting procedure to obtain uniform solvent content with accompanying experimental results J. Micromech. Microeng. 15 1242-8
20. Jin P, Jiang K and Sun N 2003 Microfabrication of ultra-thick SU-8 photoresist for microengines Micromach. Microfab. Process Technol. 7 27-29
21. Cremers C, Bouamrane F, Singleton L and Schenk R 2001 SU-8 as resist material for deep X-ray lithography Microsyst. Technol. 7 11-6
22. Microchem Corp. 2005 Processing Guidelines SU-8 2035-SU-8 2075
23. Rabarot M, Bablet J, Ruty M, Kipp M, Chartier I and Dubarry C 2003 Thick SU-8 photolithography for BioMEMS Micromach. Microfab. Process Technol. 7 27-9
24. Sanchez-Herencia A J, Millan A J, Nieto M I and Moreno R 2001 Aqueous colloidal processing of nickel powder Acta Mater. 49 645-51