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Advanced Engineering Materials

Volumn 5, Issue 12, 2003, Pages 924-927

Microfabrication of three-dimensional, free-standing ceramic MEMS components by soft moulding

(3) Zhang, Dou a Su, Bo a Button, Tim W a

a UNIVERSITY OF BIRMINGHAM (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; ALUMINA; HIGH TEMPERATURE EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROMETERS; MOLDING; PHOTORESISTS; SHRINKAGE; SINTERING; STIFFNESS; SUBSTRATES;

MICROELECTROMECHANICAL SYSTEMS; NEAR NET SHAPE FABRICATION; SOFT MOULDING; THREE DIMENSIONAL FREE STANDING CERAMIC STRUCTURES;

CERAMIC MATERIALS;

EID: 1342283891 PISSN: 14381656 EISSN: None Source Type: Journal
DOI: 10.1002/adem.200300518 Document Type: Article

Times cited : (21)

References (20)

1
- 0033897055
- S. M. Spearing, Acta Mater. 2000, 48, 179.
- (2000) Acta Mater. , vol.48 , pp. 179
- Spearing, S.M.¹

2
- 0032625140
- W. Bauer, H.-J. Ritzhaupt-Kleissl, J. Hausselt, Ceramics Int. 1995, 25, 201.
- (1999) Ceramics Int. , vol.25 , pp. 201
- Bauer, W.¹ Ritzhaupt-Kleissl, H.-J.² Hausselt, J.³

3
- 0031678454
- C. V. Hoy, A. Barda, M. Griffith, J. W. Halloran, J. Am. Ceram. Soc. 1998, 81, 152.
- (1998) J. Am. Ceram. Soc. , vol.81 , pp. 152
- Hoy, C.V.¹ Barda, A.² Griffith, M.³ Halloran, J.W.⁴

4
- 0037524101
- U. P. Schonholzer, R. Hummel, L. J. Gauckler, Adv. Mater. 2000, 12, 1261.
- (2000) Adv. Mater. , vol.12 , pp. 1261
- Schonholzer, U.P.¹ Hummel, R.² Gauckler, L.J.³

5
- 0035280354
- L. A. Liew, W. Zhang, V. M. Bright, L. An, M. L. Dunn, R. Raj, Sens. Actuators 2001, 89, 64.
- (2001) Sens. Actuators , vol.89 , pp. 64
- Liew, L.A.¹ Zhang, W.² Bright, V.M.³ An, L.⁴ Dunn, M.L.⁵ Raj, R.⁶

6
- 0031632795
- Y. Xia, G. M. Whitesides, Annu. Rev. Mater. Sci. 1998, 28, 153.
- (1998) Annu. Rev. Mater. Sci. , vol.28 , pp. 153
- Xia, Y.¹ Whitesides, G.M.²

7
- 0002920287
- D. Qin, Y. Xia, J. A. Rogers, R. J. Jackmann, X.-M. Zhao, G. M. Whitesides, Topics in Current Chemistry 1998, 194, 1.
- (1998) Topics in Current Chemistry , vol.194 , pp. 1
- Qin, D.¹ Xia, Y.² Rogers, J.A.³ Jackmann, R.J.⁴ Zhao, X.-M.⁵ Whitesides, G.M.⁶

8
- 0034300429
- S. Seraji, Y. Wu, N. E. Jewell-Larson, M. J. Forbess, S. J. Limmer, T. P. Chou, G. Cao, Adv. Mater. 2000, 12, 1421.
- (2000) Adv. Mater. , vol.12 , pp. 1421
- Seraji, S.¹ Wu, Y.² Jewell-Larson, N.E.³ Forbess, M.J.⁴ Limmer, S.J.⁵ Chou, T.P.⁶ Cao, G.⁷

9
- 0035131680
- H. Yang, P. Deschatelets, S. Brittain, G. M. Whitesides, Adv. Mater. 2001, 13, 54.
- (2001) Adv. Mater. , vol.13 , pp. 54
- Yang, H.¹ Deschatelets, P.² Brittain, S.³ Whitesides, G.M.⁴

10
- 0033276955
- W. S. Beh, Y. Xia, D. Qin, Mater. Res. 1999, 14, 3995.
- (1999) Mater. Res. , vol.14 , pp. 3995
- Beh, W.S.¹ Xia, Y.² Qin, D.³

11
- 0033342407
- R. N. Basu, M. J. Mayo, C. A. Randall, Jpn. J. Appl. Phys. 1999, 38, 6462.
- (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 6462
- Basu, R.N.¹ Mayo, M.J.² Randall, C.A.³

12
- 0034248458
- G. Lammel, P. Renaud, Sens. Actuators 2000, 85, 356.
- (2000) Sens. Actuators , vol.85 , pp. 356
- Lammel, G.¹ Renaud, P.²

13
- 0040968538
- P. Kleimann, J. Linnros, R. Juhasz, Appl. Phys. Lett. 2001, 79, 1727.
- (2001) Appl. Phys. Lett. , vol.79 , pp. 1727
- Kleimann, P.¹ Linnros, J.² Juhasz, R.³

14
- 0033537531
- H. Ohji, P. J. Trimp, P. J. French, Sens. Actuators 1999, 73, 95.
- (1999) Sens. Actuators , vol.73 , pp. 95
- Ohji, H.¹ Trimp, P.J.² French, P.J.³

15
- 0342264752
- L. F. Wang, Q. Ji, T. E. Glass, T. C. Ward, J. E. McGrath, M. Muggli, G. Burns, U. Sorathia, Polymer 2000, 41, 5083.
- (2000) Polymer , vol.41 , pp. 5083
- Wang, L.F.¹ Ji, Q.² Glass, T.E.³ Ward, T.C.⁴ McGrath, J.E.⁵ Muggli, M.⁶ Burns, G.⁷ Sorathia, U.⁸

16
- 0031552575
- E. Delamarche, H. Schmid, B. Michel, H. Biebuyck, Adv. Mater. 1997, 9, 741.
- (1997) Adv. Mater. , vol.9 , pp. 741
- Delamarche, E.¹ Schmid, H.² Michel, B.³ Biebuyck, H.⁴

17
- 0030653742
- H. A. Biebuyck, N. B. Larsen, E. Delamarche, B. Michel, IBM J. Res. Dev. 1997, 41, 159.
- (1997) IBM J. Res. Dev. , vol.41 , pp. 159
- Biebuyck, H.A.¹ Larsen, N.B.² Delamarche, E.³ Michel, B.⁴

18
- 0030263409
- X.-M. Zhao, Y. Xia, G. M. Whitesides, Adv. Mater. 1996, 8, 837.
- (1996) Adv. Mater. , vol.8 , pp. 837
- Zhao, X.-M.¹ Xia, Y.² Whitesides, G.M.³

19
- 0042564474
- P. Jin, K. Jiang and N. J. Sun, Proc. of the Society of Photo-Optical Instrumentation Engineers (SPIE) 2003, 4979, 105.
- (2003) Proc. of the Society of Photo-Optical Instrumentation Engineers (SPIE)
- Jin, P.¹ Jiang, K.² Sun, N.J.³

20
- 0042370448
- U. P. Schonholzer, L. J. Gauckler, Adv. Mater. 1999, 11, 630.
- (1999) Adv. Mater. , vol.11 , pp. 630
- Schonholzer, U.P.¹ Gauckler, L.J.²

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