Laser prototyping of MEMS structures and SiN cantilevers: Experience teaching a practical undergraduate course

IEE Proceedings: Science, Measurement and Technology

Volumn 151, Issue 2, 2004, Pages 54-59

  Moore, D F ^a   Williams, J A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; ENGINEERING EDUCATION; ETCHING; LASER BEAM CUTTING; MASKS; MICROMACHINING; RAPID PROTOTYPING; SILICON CARBIDE; SILICON NITRIDE;

LASER PROTOTYPING; MICROBEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 16544390141     PISSN: 13502344     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-smt:20040046     Document Type: Article

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