Micro-electro-discharge machining as microsensor fabrication technology

IEEE Sensors Journal

Volumn 3, Issue 5, 2003, Pages 632-639

  Meeusen, Wim ^a   Clijnen, Joeri ^a   Reynaerts, Dominiek ^a   Van Brussel, Hendrik ^a   Puers, Robert ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b Katholieke Universiteit Leuven   (Belgium)

Author keywords

Force sensor; Inclination sensor; Micro electrodischarge machining (EDM)

Indexed keywords

BANDWIDTH; BENDING (DEFORMATION); DIAPHRAGMS; MICROMACHINING; OPTIMIZATION; PHOTODIODES; PHOTOLITHOGRAPHY; SENSITIVITY ANALYSIS; SHIELDING; STIFFNESS; THERMAL EFFECTS;

FORCE SENSOR; INCLINATION SENSOR; MICRO-ELECTRODISCHARGE MACHINING (EDM); POSITION SENSITIVE DEVICE (PSD);

MICROSENSORS;

EID: 3042784691     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2003.818459     Document Type: Article

References (12)

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