Sensitivity enhancement of a silicon micro-machined thermal flow sensor

Sensors and Actuators, A: Physical

Volumn 128, Issue 1, 2006, Pages 1-6

  Roh, Sung Cheoul ^a   Choi, Yong Moon ^a,b   Kim, Soo Yong ^a  

^a Korea Institute of Machine and Materials   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Micro machining; Sensitivity; Sensor response time; Thermal flow sensor

Indexed keywords

SENSOR RESPONSE TIME; THERMAL FLOW SENSOR; VOLTAGE DIFFERENCE;

FLOW OF FLUIDS; MICROMACHINING; REYNOLDS NUMBER; SENSITIVITY ANALYSIS; SILICON; THERMOPILES;

SENSORS;

EID: 33645164416     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.05.007     Document Type: Article

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