A fully-integrated MEMS preconcentrator for rapid gas sampling

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1497-1500

  Bae, Byunghoon ^a   Yeom, Junghoon ^a   Radadia, Adarsh D ^b   Masel, Richard I ^b   Shannon, Mark A ^a  

^a United States of America   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Microheater; Microvalve; Preconcentrator

Indexed keywords

ACTUATORS; ARSENIC COMPOUNDS; CHLORINE COMPOUNDS; COMPOSITE MICROMECHANICS; FLAME SPRAYING; INDUSTRIAL CHEMICALS; INJECTION (OIL WELLS); IONIZATION OF GASES; MEMS; MICROSYSTEMS; OPTICAL DESIGN; SENSORS; SEPARATION; TRANSDUCERS; VOLATILE ORGANIC COMPOUNDS;

CONVENTIONAL SYSTEMS; FLAME IONIZATION DETECTOR; FRONT END; GAS SAMPLING; GASEOUS SPECIES; INTEGRATED MEMS; INTERNATIONAL CONFERENCES; MICRO HEATERS; MICRO-VALVES; MICROHEATER; MICROLITER; MICROVALVE; PHOSPHONATES; PRE CONCENTRATORS; PRECONCENTRATOR; RESPONSE TIME; SEPARATION COLUMNS; SOLID-STATE SENSORS; TOXIC INDUSTRIAL CHEMICALS; VOLATILE COMPOUNDS;

MICROELECTROMECHANICAL DEVICES;

EID: 50049132851     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300428     Document Type: Conference Paper

References (8)

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