Multiple-stage microfabricated preconcentrator-focuser for micro gas chromatography system

Journal of Microelectromechanical Systems

Volumn 14, Issue 3, 2005, Pages 498-507

  Tian, Wei Cheng ^a   Chan, Helena K L ^a   Lu, Chia Jung ^a   Pang, Stella W ^a   Zellers, Edward T ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Adsorbent; Gas detection; Micro gas chromatography ( GC); Micro heater; Microelectromechanical systems (MEMS); Preconcentrator focuser (PCF)

Indexed keywords

ADSORBENTS; AIR; CARBON; FUSED SILICA; GAS CHROMATOGRAPHY; MICROMACHINING; PRESSURE DROP; REACTIVE ION ETCHING; SILICON; VOLATILE ORGANIC COMPOUNDS;

GAS DETECTION; MICRO GAS CHROMATOGRAPHY; MICRO HEATER; PRECONCENTRATOR FOCUSER (PCF);

MICROELECTROMECHANICAL DEVICES;

EID: 22444451077     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.844842     Document Type: Article

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