Membrane-suspended microgrid as a gas preconcentrator for chromatographic applications

Sensors and Actuators, A: Physical

Volumn 135, Issue 1, 2007, Pages 192-196

  Ruiz, A M ^a   Gracia I ^a   Sabate N ^a   Ivanov, P ^a   Sanchez A ^a   Duch, M ^a   Gerboles M ^a   Moreno, A ^a   Cane C ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Gas chromatography; Microheater; Microsystems; Preconcentrator

Indexed keywords

CHROMATOGRAPHIC ANALYSIS; POLYSILICON; REACTIVE ION ETCHING; SPECIFIC HEAT;

INSULATING MEMBRANE; MICROGRID; PRECONCENTRATOR; SILICON GRID STRUCTURE;

MICROSYSTEMS;

EID: 33947195897     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.07.005     Document Type: Article

References (13)

1. Kolesar E.S., and Reston R.R. Review and summary of a silicon micromachined gas chromatography system. IEEE Trans. Comp. Pack. Manuf. Technol. B 21 4 (1998) 324-328
2. C.J. Lu, W.C. Tian, W.H. Steinecker, A. Guyon, M. Agah, M.C. Oborny, R.D. Sacks, K.D. Wise, S.W. Pang, E.T. Zellers, Functionally integrated MEMS microgas chromatograph subsystem, in: Proceedings of the Seventh International Conference on Miniat. Chem. Biochem. Anal. Sys., California, USA, October 5-9, 2003.
3. Lorenzelli L., Benvenuto A., Adami A., Guarnieri V., Margesin B., Mulloni V., and Vincenzi D. Biosens. Bioelectron. 20 (2005) 1968-1976
4. Nakamoto T., Isaka Y., Ishige T., and Moriizumi T. Odor-sensing system using preconcentrator with variable temperature. Sens. Actuators B 69 (2000) 58-62
5. Groves W.A., Zellers E.T., and Frye G.C. Analyzing organic vapors in exhaled breath using a surface acoustic wave sensor array with preconcentration: Selection and characterization of the preconcentrator adsorbent. Anal. Chim. Acta 371 (1998) 131-143
6. Nakamoto T., and Sumitimo E. Study of robust odor sensing system with auto-sensitivity control. Sens. Actuators B 89 (2003) 285-291
7. Grate J.W., Rose-Pehrsson S.L., Venezky D.L., Klusty M., and Wohltjen H. Anal. Chem. 65 (1993) 1868
8. Tian W.C., and Pang S.W. Thick and thermally isolated Si microheaters for microfabricated preconcentrators. J. Vac. Sci. Technol. B 21 1 (2003) 274-279
9. Tian W.C., Pang S.W., Lu C.J., and Zellers E.T. Microfabricated preconcentrator-focuser for a microscale gas chromatograph. J. Microelectrochem. Syst. 12 3 (2003) 264-272
10. Tian W.C., Chan H.K.L., Lu C.J., Pang S.W., and Zellers E.T. Multiple-stage microfabricated preconcentrator-focuser for micro gas chromatography system. J. Microelectrochem. Syst. 14 3 (2005) 498-507
11. Götz A., Gràcia I., Cané C., Lora-Tamayo E., Horrillo C., Getino J., García C., and Gutiérrez-Monreal J. A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons. Sens. Actuators B 44 (1997) 483-487
12. Sabaté N., Santander J., Gràcia I., Fonseca L., Figueras E., Cabruja E., and Cané C. Characterization of thermal conductivity in thin film multilayered membranes. Thin Solid Films 484 (2005) 328-333
13. M. Duch, J.A. Plaza, C. Cane, Glass wet etching considerations, in: Proceeding of the MME'02. Micromechanics Europe. Sinaia, Romania, October 2002.