Modeling low energy sputtering of hexagonal boron nitride by xenon ions

Journal of Applied Physics

Volumn 104, Issue 12, 2008, Pages

  Yim, John T ^a   Falk, Michael L ^b   Boyd, Iain D ^c  

^a ASRC Aerospace Corp   (United States)

^b Johns Hopkins University   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; BORON NITRIDE; DYNAMICS; EXPERIMENTS; ION BOMBARDMENT; IONS; MOLECULAR DYNAMICS; NITRIDES; QUANTUM CHEMISTRY; SPUTTERING; XENON;

CHANNEL WALLS; EXPERIMENTAL CHARACTERIZATIONS; EXPERIMENTAL DATUMS; HALL THRUSTERS; HEXAGONAL BORON NITRIDES; ION ENERGIES; LOW ENERGIES; LOW ENERGY SPUTTERING; LOW YIELDS; SEMIEMPIRICAL; SIMULATION DATUMS; SPUTTER YIELDS; SPUTTERING PROCESSES; SURFACE TEMPERATURES; XENON IONS;

CUBIC BORON NITRIDE;

EID: 58149268949     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2987090     Document Type: Article

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