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Volumn 56, Issue 4, 2000, Pages 247-252

Features of sputtering of nitrides with various component mass ratios

(4) Promokhov, A A a Mosunov, A S a Elovikov, S S a Yurasova, V E a

a MOSCOW STATE UNIVERSITY (Russian Federation)

Author keywords

AlN; BN; Computer simulation; GaN; Nitride; Sputtering

Indexed keywords

EID: 0010359451 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/s0042-207x(00)00123-8 Document Type: Article

Times cited : (19)

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