Mass dependence of nitride sputtering

Radiation Effects and Defects in Solids

Volumn 158, Issue 8, 2003, Pages 573-582

  Elovikov, S S ^a   Khrustachev, I K ^a   Mosunov, A S ^a   Yurasova, V E ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Collision cascades; Computer simulations; Nitrides; Sputtering

Indexed keywords

COMPUTER SIMULATION; ION BOMBARDMENT; MOLECULAR DYNAMICS; POLYCRYSTALS; SPUTTERING;

COLLISION CASCADES; WURTZITE STRUCTURES;

NITRIDES;

EID: 28344432894     PISSN: 10420150     EISSN: 10294953     Source Type: Journal    
DOI: 10.1080/1042015031000078297     Document Type: Article

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