Nanopositioning for probe storage

Proceedings of the American Control Conference

Volumn 6, Issue , 2005, Pages 4181-4186

  Sebastian, A ^a   Pantazi, A ^a   Cherubini, G ^a   Eleftheriou, E ^a   Lantz, M A ^a   Pozidis, H ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEM ANALYSIS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; PLASTIC FILMS; PROBES; SCANNING;

AREAL DENSITY; MICRO-SCANNERS; NANOPOSITIONING; PROBE STORAGE;

DATA STORAGE EQUIPMENT;

EID: 23944440520     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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