Structure and gas-barrier properties of amorphous hydrogenated carbon films deposited on inner walls of cylindrical polyethylene terephthalate by plasma-enhanced chemical vapor deposition

Applied Surface Science

Volumn 255, Issue 7, 2009, Pages 3983-3988

  Li, Jing ^a   Gong, Chunzhi ^a,b   Tian, Xiubo ^a   Yang, Shiqin ^a   Fu, Ricky K Y ^b   Chu, Paul K ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Amorphous hydrogenated carbon film; Plasma enhanced chemical vapor deposition; Radio frequency; Raman spectroscopy; Uniformity

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; HYDROGENATION; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTIC BOTTLES; POLYETHYLENE TEREPHTHALATES; RADIO WAVES; RAMAN SPECTROSCOPY;

AMORPHOUS HYDROGENATED CARBON FILMS; COATING UNIFORMITY; GAS BARRIER PROPERTIES; HIGH DENSITY PLASMAS; POLYETHYLENE TEREPHTHALATES (PET); RADIO FREQUENCIES; RADIO FREQUENCY POWER; UNIFORMITY;

GAS PERMEABLE MEMBRANES;

EID: 58149097936     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.10.064     Document Type: Article

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