Properties and durability of thin a-C:H overcoats produced by plasma enhanced chemical vapor deposition

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 249-253

  Wu, Mei Ling ^a   Howard, Kent ^a   Grannen, Kevin ^b   Gui, Jing ^b   Rauch, Gary C ^b   Sides, Paul J ^c  

^a SEAGATE RESEARCH   (United States)

^b SEAGATE TECHNOLOGY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; HYDROGENATION; INTERFACES (MATERIALS); ION BOMBARDMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; REACTION KINETICS; SUBSTRATES; TRIBOLOGY;

RADIO-FREQUENCY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION METHOD;

AMORPHOUS FILMS;

EID: 18844466597     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01301-8     Document Type: Article

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