Investigation of diamond-like carbon formed on PET film by plasma-source ion implantation using C2H2 and CH4

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 712-716

  Yoshida, M ^a   Watanabe, S ^b   Tanaka, T ^b   Takagi, T ^b   Shinohara, M ^c,d   Lee, J W ^e  

^a MITSUBISHI HEAVY INDUSTRIES LTD   (Japan)

^b HIROSHIMA INSTITUTE OF TECHNOLOGY   (Japan)

^c Kurita Seisakusho Co Ltd   (Japan)

^d Ujitawara Industrial Park   (Japan)

^e Hallym University   (South Korea)

Author keywords

DLC; Methane; PET; PSII

Indexed keywords

AMORPHOUS FILMS; CARBON; HYDROGENATION; ION IMPLANTATION; PLASMA SOURCES; POLYETHYLENE TEREPHTHALATES;

OXYGEN TRANSMISSION RATES (OTR);

DIAMOND LIKE CARBON FILMS;

EID: 0038413492     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00869-3     Document Type: Conference Paper

References (15)

1. E. Shimanura, K. Nagashima, A. Shirakua, in: Proceedings of the 10th IAPRI World Conference on Packing, 1997, p. 251.
2. Watanabe T., Yamamoto K., Koga Y., Tanaka A. Sci. Technol. Adv. Mat. 2:2001;539.
3. Conrad J.R., Radtke J.L., Dodd R.A., Worzala F.J., Tran N.C. J. Appl. Phys. 62:1987;777.
4. Conrad J.R., Radtke J.L., Dodd R.A., Worzala F.J. J. Appl. Phys. 62:1987;4591.
5. Dodd R.A., Han S., Madapura M., Scheuer J., Sridharan K., Worzala F.J. Am. Soc. Mech. Eng., Prod. Eng. Div. 65:1989;70.
6. Tanaka T., Yoshida M., Shinohara M., Takagi T. J. Vac. Sci. Technol. A. 20(3):2002;625.
7. Yoshida M., Tanaka T., Shinohara M., Watanabe S., Lee J.W., Takagi T. J. Vac. Sci. Technol. A. 20(5):2002;1802.
8. Watanabe S., Shinohara M., Kodama H., Tanaka T., Yoshida M., Takagi T. Thin Solid Films. 420-421C:2002;247.
9. Miyagawa S., Nakao S., Ikeyama M., Miyagawa Y. Surf. Coat. Techol. 156:2002;322.
10. Volz K., Ensinger W., Baba K., Hatada R. Surf. Coat. Technol. 136:2001;197.
11. Miyagawa Y., Nakao S., Ikeyama M., Miyagawa S. Surf. Coat. Technol. 136:2001;122.
12. Jackson S.T., Nuzzo R.G. Appl. Surf. Sci. 90:1995;195.
13. Fourches N., Turban G. Thin Solid Films. 240:1994;28.
14. Weiler M., Sattel S., Geissen T., Jung K., Ehrhardt H., Veerasamy V.S., Robertson J. Phys. Rev. B. 53:1996;1594.
15. He X.M., Walter K.C., Nastasi M. J. Mater. Res. 15:2000;564. [blank_line]