The effects of the nitrogen on the electrical and structural properties of the diamond-like carbon (DLC) films

Microelectronics Journal

Volumn 34, Issue 5-8, 2003, Pages 639-641

  Guerino, M ^a   Massi, M ^a   Maciel, H S ^a   Otani, C ^a   Mansano, R D ^b  

^a INSTITUTO DE ESTUDOS AVANÇADOS   (Brazil)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Fermi level shift; Nitrogenated diamond like carbon films; Single crystal Si(100)

Indexed keywords

CHEMICAL BONDS; DEPOSITION; ELECTRIC PROPERTIES; FERMI LEVEL; MAGNETRON SPUTTERING; NITROGEN; PARTIAL PRESSURE; PLASMAS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS;

FERMI LEVEL SHIFT;

DIAMOND LIKE CARBON FILMS;

EID: 0037905401     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(03)00079-X     Document Type: Conference Paper

References (6)

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