PZT Material properties at UHF and microwave frequencies derived from FBAR measurements

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2004, Pages 173-177

  Larson III, John D ^a   Gilbert, Stephen R ^a   Xu, Baomin ^b  

^a AGILENT LABORATORIES   (United States)

^b PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LEAD ZIRCONATE TITANATE (PZT); MASON MODEL; MICROWAVE FREQUENCIES; POLING;

ATTENUATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY; PIEZOELECTRIC MATERIALS; SOL-GELS; THIN FILMS;

LEAD COMPOUNDS;

EID: 21744443775     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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