Optical inhomogeneity and microstructure of ZrO2 thin films prepared by ion-assisted deposition

Applied Optics

Volumn 35, Issue 28, 1996, Pages 5545-5552

  Cho, Hyun Ju ^a   Hwangbo, Chang Kwon ^a  

^a Inha University   (South Korea)

Author keywords

Columnar microstructure; Inhomogeneity; Ion assisted deposition; ZrO2 thin films

Indexed keywords

EID: 0001046116     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.005545     Document Type: Article

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