In situ characterization of block copolymer ordering on chemically nanopatterned surfaces by time-resolved small angle x-ray scattering

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 6, 2008, Pages 2504-2508

  Stuen, K O ^a   Liu, C ^a   Welander, A M ^a   Liu, G ^a   De Pablo, J J ^a   Nealey, P F ^a   Satapathy, D K ^b   Nygrd, K ^b   Bunk, O ^b   Solak, H H ^b   Van Der Veen, J F ^b  

^a University of Wisconsin Madison   (United States)

^b PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING PROCESSES; BLOCK COPOLYMER BLENDS; GRATING STRUCTURES; IN SITU CHARACTERIZATIONS; MOLECULAR SIMULATIONS; NANOPATTERNED SURFACES; REAL TIMES; SMALL ANGLE X-RAY SCATTERINGS; SPACE IMAGES; SPECIFIC TIMES; TIME-RESOLVED; TOP DOWNS; TRANSMISSION MODES;

ANNEALING; BLOCK COPOLYMERS; COPOLYMERIZATION; PLASTIC PRODUCTS; SCATTERING; SPACE PROBES; THICK FILMS; X RAY SCATTERING;

POLYMERS;

EID: 57249104949     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2991977     Document Type: Article

References (41)

1. K. C. Daoulas, M. Muller, M. P. Stoykovich, H. Kang, J. J. de Pablo, and P. F. Nealey, Langmuir 24, 1284 (2008).
2. E. W. Edwards, M. Muller, M. P. Stoykovich, H. H. Solak, J. J. de Pablo, and P. F. Nealey, Macromolecules 40, 90 (2007).
3. D. J. C. Herr, Future Fab International, edited by B. Dustrud (Montgomery Research Inc., San Francisco, 2005), p. 18; available at http://www,future-fab. com.
4. D. J. C. Herr, Future Fab International, edited by B. Dustrud (Montgomery Research Inc., San Francisco, 2006), p. 20; available at http://www,future-fab. com.
5. M. P. Stoykovich and P. F. Nealey, Mater. Today 9, 20 (2006).
6. International Technology Roadmap for Semiconductors (ITRS) (2007); available at http://www.itrs.net.
7. M. P. Stoykovich, M. Muller, S. O. Kim, H. H. Solak, E. W. Edwards, J. J. de Pablo, and P. F. Nealey, Science 308, 1442 (2005).
8. E. W. Edwards, M. F. Montague, H. H. Solak, C. J. Hawker, and P. F. Nealey, Adv. Mater. (Weinheim, Ger.) 16, 1315 (2004).
9. M. P. Stoykovich, H. Kang, K. C. Daoulas, G. Liu, C. C. Liu, J. J. de Pablo, M. Mueller, and P. F. Nealey, ACS Nano 1, 168 (2007).
10. R. Ruiz, H. M. Kang, F. A. Detcheverry, E. Dobisz, D. S. Kercher, T. R. Albrecht, J. J. de Pablo, and P. F. Nealey, Science 321, 936 (2008).
11. C. T. Black, ACS Nano 1, 147 (2007).
12. A. M. Welander, H. Kang, K. O. Stuen, H. H. Solak, M. Muller, J. J. De Pablo, and P. F. Nealey, Macromolecules 48, 2759 (2008).
13. J. Holoubek, J. Baldrian, and J. Lal, Chem. Phys. 208, 739 (2007).
14. J. Holoubek, J. Baldrian, F. Lednicky, S. Malkova, and J. Lal, Macromol. Chem. Phys. 207, 1834 (2006).
15. J. K. Kim, H. H. Lee, M. Ree, K. B. Lee, and Y. Park, Macromol. Chem. Phys. 199, 641 (1998).
16. N. Sakamoto and T. Hashimoto, Macromolecules 31, 3815 (1998).
17. N. Sakamoto and T. Hashimoto, Macromolecules 31, 3292 (1998).
18. N. Sota, N. Sakamoto, K. Saijo, and T. Hashimoto, Polymer 47, 3636 (2006).
19. L. Tsarkova, A. Horvat, G. Krausch, A. V. Zvelindovsky, G. J. A. Sevink, and R. Magerle, Langmuir 22, 8089 (2006).
20. I. W. Hamley, V. Castelletto, Z. B. Lu, C. T. Imrie, T. Itoh, and M. Al-Hussein, Macromolecules 37, 4798 (2004).
21. C. Harrison, D. H. Adamson, Z. D. Cheng, J. M. Sebastian, S. Sethuraman, D. A. Huse, R. A. Register, and P. M. Chaikin, Science 290, 1558 (2000).
22. C. Harrison, Europhys. Lett. 67, 800 (2004).
23. C. Harrison, Phys. Rev. E 66, 011706 (2002).
24. A. M. Mayes, T. P. Russell, P. Bassereau, S. M. Baker, and G. S. Smith, Macromolecules 27, 749 (1994).
25. J. Y. Cheng, C. A. Ross, E. L. Thomas, H. I. Smith, and G. J. Vancso, Appl. Phys. Lett. 81, 3657 (2002).
26. K. W. Guarini, C. T. Black, and S. H. I. Yeuing, Adv. Mater. (Weinheim, Ger.) 14, 1290 (2002).
27. R. Ruiz, N. Ruiz, Y. Zhang, R. L. Sandstrom, and C. T. Black, Adv. Mater. (Weinheim, Ger.) 19, 2157 (2007).
28. R. Ruiz, R. L. Sandstrom, and C. T. Black, Adv. Mater. (Weinheim, Ger.) 19, 587 (2007).
29. E. W. Edwards, M. P. Stoykovich, M. Muller, H. H. Solak, J. J. De Pablo, and P. F. Nealey, J. Polym. Sci., Part B: Polym. Phys. 43, 3444 (2005).
30. S. O. Kim, H. H. Solak, M. P. Stoykovich, N. J. Ferrier, J. J. de Pablo, and P. F. Nealey, Nature (London) 424, 411 (2003).
31. H. Dohi, H. Kimura, M. Kotani, T. Kaneko, T. Kitaoka, T. Nishi, and H. Jinnai, Polym. J. (Tokyo, Jpn.) 39, 749 (2007).
32. R. Levicky, N. Koneripalli, M. Tirrell, J. F. Ankner, H. Kaiser, and S. K. Satija, Macromolecules 31, 4908 (1998).
33. V. R. Tirumala, Chem. Mater. 19, 5868 (2007).
34. K. I. Niihara, U. Matsuwaki, N. Torikai, H. Atarashi, K. Tanaka, and H. Jinnai, Macromolecules 40, 6940 (2007).
35. M. Kato, T. Ito, Y. Aoyama, K. Sawa, T. Kaneko, N. Kawase, and H. Jinnai, J. Polym. Sci., Part B: Polym. Phys. 45, 677 (2007).
36. H. Sugihara, K. Oya, H. Murase, K. Akabori, K. Tanaka, T. Kajiyama, and A. Takahara, Appl. Surf. Sci. 254, 3180 (2008).
37. K. Matyjaszewski and J. H. Xia, Chem. Rev. (Washington, D.C.) 101, 2921 (2001).
38. H. H. Solak, C. David, J. Gobrecht, V. Golovkina, F. Cerrina, S. O. Kim, and P. F. Nealey, Microelectron. Eng. 67-68, 56 (2003).
39. K. O. Stuen, I. In, E. Han, J. A. Streifer, R. J. Hamers, P. F. Nealey, and P. Gopalan, J. Vac. Sci. Technol. B 25, 1958 (2007).
40. R. D. Peters, X. M. Yang, Q. Wang, J. J. de Pablo, and P. F. Nealey, J. Vac. Sci. Technol. B 18, 3530 (2000).
41. H. Yokoyama and E. J. Kramer, Macromolecules 31, 7871 (1998).