Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6921, Issue , 2008, Pages

  Hill, S B ^a   Faradzhev, N S ^a   Tarrio, C ^a   Lucatorto, T B ^a   Madey, T E ^b   Yakshinskiy, B V ^b   Loginova, E ^b,d   Yulin, S ^c  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b RUTGERS UNIVERSITY   (United States)

^c FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^d SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Euv optics; Extreme ultraviolet; Lifetime testing; Lithography; Reflectometry; Ruthenium films

Indexed keywords

EUV OPTICS; EXTREME ULTRAVIOLET; LIFETIME TESTING; REFLECTOMETRY; RUTHENIUM FILMS;

ACETONE; HYDROCARBONS; MULTILAYERS; REFLECTION; RUTHENIUM;

MIRRORS;

EID: 57249091883     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772627     Document Type: Conference Paper

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