Surface chemistry of Ru: Relevance to optics lifetime in EUVL

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6533, Issue , 2007, Pages

  Wasielewski, R ^a   Yakshinskiy, B V ^a   Hedhili, M N ^a   Ciszewski, A ^a   Madey, T E ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

Atomic H; Electron induced reactions; EUV optics contamination; EUV optics lifetime; Extreme ultraviolet lithography (EUVL); Hydrogen; Methyl methacrylate (MMA); Oxygen; Ru(101 0); Ruthenium

Indexed keywords

ELECTRON INDUCED REACTIONS; EUV OPTICS CONTAMINATION; EUV OPTICS LIFETIME; METHYL METHACRYLATE (MMA); MULTILAYER MIRRORS;

EXTREME ULTRAVIOLET LITHOGRAPHY; HYDROGEN; MULTILAYERS; OXYGEN; POLYMERIZATION; SURFACE CHEMISTRY;

RUTHENIUM;

EID: 35148832602     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.737185     Document Type: Conference Paper

References (16)

1. T. E. Madey, N. S. Faradzhev, B. V. Yakshinskiy, and N.V. Edwards, "Surface phenomena related to mirror degradation in extreme ultraviolet (EUV) lithography", Appl. Surf. Sci. 253, 1691-1708 (2006).
2. 2 films", Surf. Rev. Lett. 7, 75-87 (2000).
3. M. Knapp, D. Crihan, A. P. Seitsonen, and H. Over, "Hydrogen transfer reaction on the surface of an oxide catalyst", J. Am. Chem. Soc. 127, 3236-3237 (2005).
4. J. Assmann, V. Narkhede, L. Khodeir, E. Loftier, O. Hinrichsen, A. Birkner, H. Over, and M. Muhler, "On the nature of the active state of supported ruthenium catalysts used for the oxidation of carbon monoxide: steady-state and transient kinetics combined with in situ infrared spectroscopy", J. Phys. Chem. B 108, 14634-14642 (2004).
5. J. Xie, W. J. Mitchell, K. J. Lyons, Y. Wang, and W. H. Weinberg, "Observation of the reaction of gas-phase atomic hydrogen with Ru(001)-p(1×2)-0 at 100K", J. Vac. Sci. Technol. A 12, 2210-2214 (1994).
6. M. Schick, J. Xie, W. J. Mitchell, and W. H. Weinberg, "Interaction of gas-phase atomic deuterium with the Ru(001)-(1×2)-O surface: Kinetics of hydroxyl and water formation", J. Chem. Phys. 104, 7713-7718 (1996).
7. H. Oizumi, H. Yamanashi, I. Nishiyama, K. Hashimoto, S. Ohsono, A. Masuda, A. Izumi, and H. Matsumura, "Contamination removal from EUV multilayer using atomic hydrogen generated by heated catalyzer", Proc. SPIE 5751, 1147-1154 (2005).
8. I. Nishiyama, H. Oizumi, K. Motai, A. Izumi, T. Ueno, H. Akiyama, and A. Namiki, "Reduction of oxide layer on Ru surface by atomic-hydrogen treatment", J. Vac. Sci. Technol. B 23, 3129-3131 (2005).
9. M. Malinowski, C. Steinhaus, M. Clift, L. E. Klebanoff, S. Mrowka, R. Soufli, "Controlling contamination in Mo/Si multilayer mirrors by Si surface-capping modification", Proc. SPIE 4688, 442-453 (2002).
10. J. Hollenshead and L. Klebanoff, "Modeling radiation-induced carbon contamination of extreme ultraviolet optics", J. Vac. Sci. Technol. B 24, 64-82 (2006).
11. J. Y. Huang, H. G. Huang, Y. S. Ning, Q. P. Liu, S. F. Alshahateet, Y. M. Sun, and G. Q. Xu, "A[4+2]-like cycloaddition of methyl methacrylate on Si(100)-2×1 ", Langmuir 21, 11722-11728 (2005).
12. R. A. Rosenberg, D. C. Mancini, "Deposition of carbon on gold using synchrotron radiation", Nucl. Instr. Meth. Phys. Res. A 291, 101-106 (1990).
13. K. Boller, R.-P. Haelbich, H. Hogrefe, W. Jark, and C. Kunz, "Investigation of carbon contamination of mirror surfaces exposed to synchrotron radiation", Nucl. Instr. Meth. 208, 273-279 (1983).
14. I. Nishiyama, "Model of Ru surface oxidation for the lifetime scaling of EUVL projection optics mirror", Proc. SPIE 6151 (2006).
15. 2O oxidation of ruthenium optic coatings", J. Vac. Sci. Technol. B 24, 118-130 (2006).
16. B. V. Yakshinskiy, R. Wasielewski, E. Loginova, and Theodore E. Madey, "Processes on ruthenium surfaces related to degradation of EUV mirrors", Proc. SPIE 6517 (2007).