DIET processes on ruthenium surfaces related to extreme ultraviolet lithography (EUVL)

Surface Science

Volumn 602, Issue 20, 2008, Pages 3220-3224

  Yakshinskiy, B V ^a   Wasielewski, R ^a   Loginova, E ^a   Hedhili, M N ^a   Madey, T E ^a  

^a State University of New Jersey   (United States)

Author keywords

Electron stimulated desorption; Electronic transitions

Indexed keywords

DESORPTION; EXTREME ULTRAVIOLET LITHOGRAPHY; LASER PULSES; LITHOGRAPHY; RUTHENIUM; ULTRAVIOLET DEVICES;

BACKGROUND PRESSURE; CRITICAL ISSUES; DESORPTION INDUCED BY ELECTRONIC TRANSITIONS; ELECTRON-STIMULATED DESORPTION; ELECTRONIC TRANSITIONS; EXTREME ULTRA-VIOLET; HIGH VACUUM; MULTI-LAYER MIRRORS; OPERATING CONDITIONS; RU CAPPING LAYERS;

NUTRITION;

EID: 53649098438     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2007.10.055     Document Type: Article

References (22)

1. Bajt S., Alameda J.B., Barbee Jr. T.W., Clift W.M., Folta J.A., Kaufmann B., and Spiller E.A. Opt. Eng. 41 (2002) 1797
2. Malinowski M., Steinhaus C., Clift M., Klebanoff L.E., Mrowka S., and Soufli R. Proc. SPIE 4688 (2002) 442
3. Madey T.E., Faradzhev N.S., Yakshinskiy B.V., and Edwards N.V. Appl. Surf. Sci. 253 (2006) 1691
4. Yakshinskiy B.V., Madey T.E., and Ageev V.N. Surf. Rev. Lett. 7 (2000) 75
5. Lin J.-L., and Yates Jr. J.T. J. Vac. Sci. Technol. A 12 (1994) 2795
6. Nakayama K., and Hojo H. Jpn. J. Appl. Phys. Suppl. 2, Pt. 1 (1974) 113
7. Knotek M.L., and Feibelman P.J. Surf. Sci. 90 (1979) 78
8. Kurtz R.L., Stockbauer R., and Madey T.E. Nucl. Instrum. Method Phys. Res. B 13 (1986) 518
9. Tanaka S., Mase K., Nagaoka S., and Kamada M. Surf. Sci. 451 (2000) 182
10. Hartenfeller U., Aichele K., Hathiramani D., Hofman G., Steidl M., Stenke M., Salzborn E., and Pindzola M.S. J. Phys. B: At. Mol. Opt. Phys. 31 (1998) 2999
11. Yeh J.J., and Lindau I. Atom. Data Nucl. Data Table 32 (1985) 1
12. Huang J.H., Huang H.G., Ning Y.S., Liu Q.P., Alshahateet S.F., Sun Y.M., and Xu G.Q. Langmuir 21 (2005) 11722
13. Rosenberg R.A., and Mancini D.C. Nucl. Instrum. Method Phys. Res. A 291 (1990) 101
14. Wasielewski R., Yakshinskiy B.V., Hedhili M.N., Ciszewski A., and Madey T.E. Proc. SPIE 6533 (2007) 653316
15. Yakshinskiy B.V., Wasielewski R., Loginova E., and Madey T.E. Proc. SPIE 6517 (2007) 65172Z
16. Hedhili M.N., Cloutier P., Bass A.D., Madey T.E., and Sanche L. J. Chem. Phys. 125 (2006) 094704
17. Kurt R., van Beek M., Crombeen C., Zalm P., and de Tamminga Y. Proc. SPIE 4688 (2002) 702
18. S. Hill, I. Ermanoski, C. Tarrio, T.B. Lucatorto, T.E. Madey, M. Chandhok, M. Fang, P. Yan, in preparation.
19. M. Weis, M. Wedowski, B.M. Mertens, B.T. Wolschrijn, B. van Mierlo, N.B. Koster, J. van Elp, A.E. Duiserwinkel, A. van de Runstrat, US Patent 2007/0054497 A1 (March 8, 2007).
20. Davis D.J., Kyriakou G., Grant R.B., Tikhov M.S., and Lambert R.M. J. Phys. Chem. C 111 (2007) 12165
21. Hollenshead J., and Klebanoff L. J. Vac. Sci. Technol. B 24 (2006) 64
22. Evaluated Photon Data Library (EPDL 97). .