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Volumn 7, Issue 1, 1998, Pages

Actuators and their mechanisms in microengineering

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; APPLICATIONS; SENSORS; SILICON;

EID: 0031998794     PISSN: 09637346     EISSN: None     Source Type: Journal    
DOI: 10.1049/esej:19980105     Document Type: Article
Times cited : (15)

References (11)
  • 1
    • 0030106402 scopus 로고    scopus 로고
    • Surface micromechanical components for articulated robots
    • YEH, R., KRUGLICH, E. J. J., and PISTER, K. S. J.: 'Surface micromechanical components for articulated robots', IEEE J. Microelectromech. Syst., 1996, 5, (1), pp.10-17
    • (1996) IEEE J. Microelectromech. Syst. , vol.5 , Issue.1 , pp. 10-17
    • Yeh, R.1    Kruglich, E.J.J.2    Pister, K.S.J.3
  • 2
    • 0019063742 scopus 로고
    • Silicon torsional scanning mirror
    • PETERSON, K. E.: 'Silicon torsional scanning mirror', IBM J. Res. Dev., 1980, 24, pp.631-637
    • (1980) IBM J. Res. Dev. , vol.24 , pp. 631-637
    • Peterson, K.E.1
  • 3
    • 0027005132 scopus 로고
    • A fully integrated micromagnetic actuator with a multilevel meander magnetic core
    • Hilton Head Island, South Carolina, USA, 22nd-25th june
    • AHN, C. H., and ALLEN, M. G.: 'A fully integrated micromagnetic actuator with a multilevel meander magnetic core'. Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, USA, 22nd-25th june, 1992, pp.14-18
    • (1992) Proc. IEEE Solid-State Sensor and Actuator Workshop , pp. 14-18
    • Ahn, C.H.1    Allen, M.G.2
  • 4
    • 0029213616 scopus 로고
    • Piezomagnetic control of machines
    • IEE Colloquium on Active Drives for Microengineering Applications, Savoy Place, London, 26th April
    • GIBBS, M. R. J.: 'Piezomagnetic control of machines'. IEE Colloquium on Active Drives for Microengineering Applications, Savoy Place, London, 26th April 1995, IEE Colloq. Digest 1995/085, pp.5/1-5/3
    • (1995) IEE Colloq. Digest 1995/085
    • Gibbs, M.R.J.1
  • 5
    • 0000575914 scopus 로고
    • Mechanical stress in a dielectric solid from a uniform electric field
    • ANDERSON, R. A.: 'Mechanical stress in a dielectric solid from a uniform electric field', Phys. Rev. B., 1986, 33, (2), pp.l302-1307
    • (1986) Phys. Rev. B. , vol.33 , Issue.2
    • Anderson, R.A.1
  • 8
    • 0029429844 scopus 로고
    • TiNi (shape memory) films on silicon for MEMS applications
    • WOLF, R. H., and HEUER, A. H.: 'TiNi (shape memory) films on silicon for MEMS applications', IEEE J. Microelectromech. Syst., 1995, 4, (4), pp.206-212
    • (1995) IEEE J. Microelectromech. Syst. , vol.4 , Issue.4 , pp. 206-212
    • Wolf, R.H.1    Heuer, A.H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.