SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 6, 2008, Pages 2529-2533

Three-dimensional alignment with 10 nm order accuracy in electron-beam lithography on rotated sample for three-dimensional nanofabrication

(2) Yamazaki, Kenji a Yamaguchi, Hiroshi a

a NTT Basic Research Laboratories (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNMENT; ESTERS; HYDROGEN; NANOSTRUCTURES; THREE DIMENSIONAL;

3D ELECTRONS; 3D NANOFABRICATION; 3D NANOSTRUCTURES; EB WRITINGS; NANOFABRICATION; POLIES (METHYL METHACRYLATE); SILSESQUIOXANE; STRUCTURAL FLEXIBILITIES; TRANSMISSION ELECTRONS;

ELECTRON BEAM LITHOGRAPHY;

EID: 57249086298 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2976600 Document Type: Article

Times cited : (14)

References (15)

1
- 3142747583
- D. Rugar, R. Budakian, H. J. Mamin, and B. W. Chui, Nature (London) 430, 329 (2004).
- (2004) Nature (London) , vol.430 , pp. 329
- Rugar, D.¹ Budakian, R.² Mamin, H.J.³ Chui, B.W.⁴

2
- 67649498791
- S. M. H. Huang, C. A. Zorman, M. Mehregany, and M. L. Roukes, Nature (London) 421, 496 (2003).
- (2003) Nature (London) , vol.421 , pp. 496
- Huang, S.M.H.¹ Zorman, C.A.² Mehregany, M.³ Roukes, M.L.⁴

3
- 18644364335
- H. Yamaguchi, Y. Hirayama, S. Miyashita, and S. Ishihara, Appl. Phys. Lett. 86, 052106 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 052106
- Yamaguchi, H.¹ Hirayama, Y.² Miyashita, S.³ Ishihara, S.⁴

4
- 0034314737
- S. Matsui, T. Kaito, J. Fujita, M. Komuro, K. Kanda, and Y. Haruyama, J. Vac. Sci. Technol. B 18, 3181 (2000).
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 3181
- Matsui, S.¹ Kaito, T.² Fujita, J.³ Komuro, M.⁴ Kanda, K.⁵ Haruyama, Y.⁶

5
- 0035899361
- S. Kawata, H. Sun, T. Tanaka, and K. Takeda, Nature (London) 412, 697 (2001).
- (2001) Nature (London) , vol.412 , pp. 697
- Kawata, S.¹ Sun, H.² Tanaka, T.³ Takeda, K.⁴

6
- 37149018002
- K. Mohamed, M. M. Alkaisi, and R. J. Blaikie, J. Vac. Sci. Technol. B 25, 2357 (2007).
- (2007) J. Vac. Sci. Technol. B , vol.25 , pp. 2357
- Mohamed, K.¹ Alkaisi, M.M.² Blaikie, R.J.³

7
- 0032537772
- S. Y. Lin, Nature (London) 394, 251 (1998).
- (1998) Nature (London) , vol.394 , pp. 251
- Lin, S.Y.¹

8
- 3042779981
- K. Yamazaki and H. Namatsu, Tech. Dig. Int. Conf. IEEE MEMS 2004, 609 (2004).
- (2004) Tech. Dig. Int. Conf. IEEE MEMS , vol.2004 , pp. 609
- Yamazaki, K.¹ Namatsu, H.²

9
- 6344224956
- K. Yamazaki and H. Namatsu, Microelectron. Eng. 73-74, 85 (2004).
- (2004) Microelectron. Eng. , vol.7374 , pp. 85
- Yamazaki, K.¹ Namatsu, H.²

10
- 6344243408
- K. Yamazaki, T. Yamaguchi, and H. Namatsu, Jpn. J. Appl. Phys., Part 2 43, L1111 (2004).
- (2004) Jpn. J. Appl. Phys., Part 2 , vol.43 , pp. 1111
- Yamazaki, K.¹ Yamaguchi, T.² Namatsu, H.³

11
- 33750105019
- K. Yamazaki and H. Namatsu, Tech. Dig. Int. Conf. IEEE MEMS 2006, 254 (2006).
- (2006) Tech. Dig. Int. Conf. IEEE MEMS , vol.2006 , pp. 254
- Yamazaki, K.¹ Namatsu, H.²

12
- 33646472151
- K. Yamazaki and H. Namatsu, Jpn. J. Appl. Phys., Part 2 45, L403 (2006).
- (2006) Jpn. J. Appl. Phys., Part 2 , vol.45 , pp. 403
- Yamazaki, K.¹ Namatsu, H.²

13
- 57249089752
- (unpublished).
- V. K. Singh, K. Yamazaki, T. Tawara, and H. Yamaguchi (unpublished).
- Singh, V.K.¹ Yamazaki, K.² Tawara, T.³ Yamaguchi, H.⁴

14
- 0002053947
- H. Namatsu, Y. Takahashi, K. Yamazaki, T. Yamaguchi, M. Nagase, and K. Kurihara, J. Vac. Sci. Technol. B 16, 69 (1998).
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 69
- Namatsu, H.¹ Takahashi, Y.² Yamazaki, K.³ Yamaguchi, T.⁴ Nagase, M.⁵ Kurihara, K.⁶

15
- 57249113948
- K. Yamazaki and H. Yamaguchi, Appl. Phys. Express 1, 097001 (2008).
- (2008) Appl. Phys. Express , vol.1 , pp. 097001
- Yamazaki, K.¹ Yamaguchi, H.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.