Optical characterization of hydrogen-free CeO 2 doped DLC films deposited by unbalanced magnetron sputtering

Applied Surface Science

Volumn 255, Issue 5 PART 2, 2008, Pages 2655-2659

  Zhang, Zhenyu ^a   Zhou, Hongxiu ^a   Guo, Dongming ^a   Gao, Hang ^a   Kang, Renke ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

CeO 2; DLC; Optical property; Unbalanced magnetron sputtering

Indexed keywords

AMORPHOUS FILMS; AUGER ELECTRON SPECTROSCOPY; CARBON FILMS; CERIUM OXIDE; DIAMOND LIKE CARBON FILMS; HYDROGEN; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PROTECTIVE COATINGS; SOLAR CELLS; SUBSTRATES; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS DLC FILMS; DEPOSITED FILMS; DOPED DIAMOND-LIKE CARBON; IR WINDOW; OPTICAL CHARACTERIZATION; RELATIVE INTENSITY RATIO; SI SUBSTRATES; UNBALANCED MAGNETRON SPUTTERING;

OPTICAL FILMS;

EID: 56949105309     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.08.002     Document Type: Article

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