Microstructure and mechanical properties of CeO2 doped diamond-like carbon films

Diamond and Related Materials

Volumn 17, Issue 3, 2008, Pages 396-404

  Zhang, Zhenyu ^a,b   Lu, Xinchun ^a   Guo, Dongming ^b   Xu, Jun ^a   Luo, Jianbin ^a  

^a TSINGHUA UNIVERSITY   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

CeO2; DLC; Mechanical properties; Unbalanced magnetron sputtering

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BOND STRENGTH (MATERIALS); DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; MICROSTRUCTURE; NANOHARDNESS; RESIDUAL STRESSES;

DEPOSITED FILMS; FILM-SUBSTRATE INTERFACES; UNBALANCED MAGNETRON SPUTTERING;

CERIUM COMPOUNDS;

EID: 40749093258     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.01.081     Document Type: Article

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