SCOPUS 정보 검색 플랫폼

Volumn 475, Issue 1-2 SPEC. ISS., 2005, Pages 303-307

Structures and mechanical properties of diamond like carbon films prepared by closed-field unbalanced magnetron sputtering

(5) Myung, Hyun S a Park, Yong S a Lee, Jae W b Hong, B a Han, Jeon G a

a Sungkyunkwan University (South Korea)

b Korea Industrial Health Association (South Korea)

Author keywords

CFUBM; Diamond like carbon (DLC); High rate sputtering

Indexed keywords

ARGON; CARBON; DEPOSITION; ELASTIC MODULI; FRICTION; GRAPHITE; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SILICON WAFERS; STIFFNESS; THIN FILMS;

CLOSED-FIELD UNBALANCED MAGNETRON SPUTTERING (CFUBM); CONTINUOUS STIFFNESS METHOD (CSM); FILM THICKNESS; HIGH RATE SPUTTERING;

DIAMOND LIKE CARBON FILMS;

EID: 13444312024 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.07.017 Document Type: Conference Paper

Times cited : (20)

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