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Volumn 88, Issue 2, 2008, Pages 145-151

Unusual stress behaviour of CeO2-doped diamond-like carbon nanofilms

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE STRESS; DIAMONDS; FILM THICKNESS; MAGNETRON SPUTTERING; RESIDUAL STRESSES; STRESS ANALYSIS;

EID: 38949153002     PISSN: 09500839     EISSN: 13623036     Source Type: Journal    
DOI: 10.1080/09500830701771947     Document Type: Article
Times cited : (11)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.